The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films
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2014 ◽
Vol 444
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pp. 217-225
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2012 ◽
Vol 258
(7)
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pp. 2894-2900
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2010 ◽
Vol 171-172
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pp. 171-174
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