Structure and mechanical properties of 3dTM ion doped RF sputtered ZnO thin films on Si (100)

2014 ◽  
Author(s):  
M. Venkaiah ◽  
R. Singh
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Zno Thin Films

ZnO Thin Films for Cantilever Coatings: Structural and Mechanical Properties, Observations of Photoplastic Effect

2008 ◽  
Vol 6 (4) ◽  
pp. 558-563 ◽  
Author(s):  
P. Horvath ◽  
S. B. Sadale ◽  
M. Suchea ◽  
S. Christoulakis ◽  
R. Voicu ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Zno Thin Films ◽  
Photoplastic Effect

Optical, electrical and mechanical properties of Ga-doped ZnO thin films under different sputtering powers

2014 ◽  
Vol 38 ◽  
pp. 87-91 ◽  
Author(s):  
Sheng Hsiung Chang ◽  
Hsin-Ming Cheng ◽  
Chuen-Lin Tien ◽  
Shih-Chin Lin ◽  
Kie-Pin Chuang
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Zno Thin Films ◽  
Doped Zno

Mechanical properties of ZnO thin films deposited on polyester substrates used in flexible device applications

2010 ◽  
Vol 519 (1) ◽  
pp. 325-330 ◽  
Author(s):  
Konstantinos A. Sierros ◽  
Derrick A. Banerjee ◽  
Nicholas J. Morris ◽  
Darran R. Cairns ◽  
Ioannis Kortidis ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Zno Thin Films ◽  
Flexible Device ◽  
Device Applications

Spatial Variation of Mechanical Properties of ZnO Thin Films RF-Sputtered in Various Gas Environment

2016 ◽  
Vol 16 (03) ◽  
pp. 1650036
Author(s):  
V. Malapati ◽  
R. Singh
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Rf Sputtering ◽  
Hexagonal Wurtzite Structure ◽  
Film Deposition ◽  
Zno Thin Films ◽  
Nitrogen Gas ◽  
Gas Environment ◽  
Quartz Substrates ◽  
Deposited Films

ZnO thin films were deposited on quartz substrates by RF sputtering under argon, oxygen and nitrogen gas environment. The as deposited films showed hexagonal wurtzite structure with (002) orientation along c-axis. The mechanical properties of films with thickness ranging from 842[Formula: see text]nm to 1067[Formula: see text]nm and grain size 94–124[Formula: see text]nm were studied using nanoindentation technique. The Young’s modulus and hardness of the films were in the range 76–257[Formula: see text]GPa and 5–18[Formula: see text]GPa, respectively. Both parameters decreased with increase in indentation depth of the films. The spatial distribution of these parameters were strongly dependent on the gas environment used for film deposition.

Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films

2011 ◽  
Vol 257 (17) ◽  
pp. 7900-7905 ◽  
Author(s):  
C.-Y. Yen ◽  
S.-R. Jian ◽  
G.-J. Chen ◽  
C.-M. Lin ◽  
H.-Y. Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Annealing Temperature ◽  
Zno Thin Films ◽  
Optical And Mechanical Properties

Effect of Transition Metals on the Mechanical Properties of ZnO Thin Films, Prepared by Sol-Gel Method

2020 ◽  
Vol 65 ◽  
pp. 27-38
Author(s):  
Sara Benzitouni ◽  
Mourad Zaabat ◽  
Jean Ebothé ◽  
Abdelhakim Mahdjoub ◽  
Meriem Guemini
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Transition Metals ◽  
Occupation Number ◽  
Sol Gel ◽  
Visible Region ◽  
Hexagonal Wurtzite Structure ◽  
Dip Coating ◽  
Zno Thin Films ◽  
Nanoelectromechanical Systems

Undoped and transition metals (TM = Cr, Ni, Mn and Cd) doped zinc oxide (ZnO) thin films were prepared by sol-gel dip-coating method on glass substrates at 300 °C. In this study, the effect of dopant material on the structural, morphological, optical, electrical and mechanical properties of ZnO thin films is investigated by using XRD, AFM, UV-Vis, Hall effect and nanoindentation techniques, respectively. Nanocrystalline films with a ZnO hexagonal wurtzite structure and two preferred orientations (002) and (103) were obtained. UV-Vis transmittance spectra showed that all the films are highly transparent in the visible region (> 80 %). Moreover, the optical band gap of the films decreased to 3.13 eV with an increasing orbital occupation number of 3d electrons. AFM-topography shows that the films are dense, smooth and uniform, except for the high roughness RMS =26.3 nm obtained for Cd-doped ZnO. Finally, the dopant material is found to have a significant effect on the mechanical behavior of ZnO as compared to the undoped material. For Ni and Cd dopants, analysis of load and unload data yields an increase in the hardness (8.96 ± 0.22 GPa) and Young’s modulus (122 ± 7.46 GPa) of ZnO as compared to Cr and Mn dopants. Therefore, Ni and Cd are the appropriate dopants for the design and application of ZnO-based nanoelectromechanical systems.

Hydrogen Effect on Structure and Mechanical Properties of ZnO Films Deposited in Ar/H2 Plasma

2010 ◽  
Vol 66 ◽  
pp. 156-161 ◽  
Author(s):  
Ruben Bartali ◽  
V. Micheli ◽  
G. Gottardi ◽  
I. Luciu ◽  
N. Laidani
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Elastic Modulus ◽  
Optical Emission ◽  
Zno Thin Films ◽  
Zno Films ◽  
Hydrogen Effect ◽  
Plasma Species ◽  
Ar Gas ◽  
Film Porosity

In the present work the mechanical properties of ZnO thin films, deposited on Si (100) substrates, were studied using the nanoindentation technique. ZnO thin films were deposited by radiofrequency sputtering from a ZnO target with different H2/Ar gas mixtures. During the deposition the plasma species were in-situ monitored using optical emission spectroscopy (OES). The results showed that the introduction of H2 in the plasma phase had a strong effect on the material’s hardness and elastic modulus. The measured elastic modulus values were then related to the material density to estimate the porosity of the ZnO films. We found an increased film porosity when H2 was added to the sputtering gas, from 6% to 18% in volume. Moreover we found that the porosity was correlated by the emission intensity ratio of atomic Argon on atomic Hydrogen.

Influence of cobalt doping on the crystalline structure, optical and mechanical properties of ZnO thin films

2010 ◽  
Vol 518 (18) ◽  
pp. 5257-5264 ◽  
Author(s):  
Nupur Bahadur ◽  
A.K. Srivastava ◽  
Sushil Kumar ◽  
M. Deepa ◽  
Bhavya Nag
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Crystalline Structure ◽  
Zno Thin Films ◽  
Cobalt Doping ◽  
Optical And Mechanical Properties
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