Morphology and structure evolution of tin-doped indium oxide thin films deposited by radio-frequency magnetron sputtering: The role of the sputtering atmosphere

Man Nie; Tayfun Mete; Klaus Ellmer

doi:10.1063/1.4871810

Morphology and structure evolution of tin-doped indium oxide thin films deposited by radio-frequency magnetron sputtering: The role of the sputtering atmosphere

Journal of Applied Physics ◽

10.1063/1.4871810 ◽

2014 ◽

Vol 115 (15) ◽

pp. 154905 ◽

Cited By ~ 3

Author(s):

Man Nie ◽

Tayfun Mete ◽

Klaus Ellmer

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Structure Evolution ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Morphology And Structure

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Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/j.jmst.2013.10.023 ◽

2014 ◽

Vol 30 (7) ◽

pp. 644-648 ◽

Cited By ~ 5

Author(s):

Jiaojiao Pan ◽

Wenwen Wang ◽

Dongqi Wu ◽

Qiang Fu ◽

Ding Ma

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Preliminary studies on molybdenum-doped indium oxide thin films deposited by radio-frequency magnetron sputtering at room temperature

Thin Solid Films ◽

10.1016/j.tsf.2007.01.022 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5512-5518 ◽

Cited By ~ 11

Author(s):

E. Elangovan ◽

A. Marques ◽

F.M. Braz Fernandes ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films

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Electrical and Optical Properties of Eu-Doped Indium Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2014.10081 ◽

2014 ◽

Vol 14 (12) ◽

pp. 8982-8986 ◽

Cited By ~ 2

Author(s):

Jong-Kwan Woo ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Germanium‐ and silicon‐doped indium‐oxide thin films prepared by radio‐frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.111894 ◽

1994 ◽

Vol 64 (11) ◽

pp. 1395-1397 ◽

Cited By ~ 34

Author(s):

Toshiro Maruyama ◽

Teruoki Tago

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Silicon Doped

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Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.03.087 ◽

2008 ◽

Vol 516 (7) ◽

pp. 1374-1376 ◽

Cited By ~ 36

Author(s):

G. Gonçalves ◽

P. Barquinha ◽

L. Raniero ◽

R. Martins ◽

E. Fortunato

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Indium Zinc Oxide

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Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2014.03.020 ◽

2014 ◽

Vol 14 (6) ◽

pp. 850-855 ◽

Cited By ~ 17

Author(s):

R. Pandey ◽

S.H. Cho ◽

D.K. Hwang ◽

W.K. Choi

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Structural And Electrical Properties ◽

Zinc Tin Oxide

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Optical properties of nano-structured zinc oxide thin films deposited by radio-frequency magnetron sputtering at different substrate temperatures

2012 IEEE Symposium on Humanities, Science and Engineering Research ◽

10.1109/shuser.2012.6268895 ◽

2012 ◽

Cited By ~ 1

Author(s):

I. Saurdi ◽

M. H. Mamat ◽

M. H. Abdullah ◽

A. Ishak ◽

M. Rusop

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Substrate Temperatures

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Highly Transparent Conducting Indium Tin Oxide Thin Films Prepared by Radio Frequency Magnetron Sputtering and Thermal Annealing

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2019.16242 ◽

2019 ◽

Vol 19 (3) ◽

pp. 1455-1462 ◽

Cited By ~ 10

Author(s):

Bhaskar Parida ◽

Youngun Gil ◽

Hyunsoo Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting

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Structural, Electrical, and Optical Properties of Bismuth-doped Zinc-oxide Thin Films Grown by Radio-frequency Magnetron Sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.72.943 ◽

2018 ◽

Vol 72 (8) ◽

pp. 943-946

Author(s):

Johngeon Shin ◽

Shinho Cho

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2007.05.025 ◽

2007 ◽

Vol 91 (18) ◽

pp. 1692-1697 ◽

Cited By ~ 129

Author(s):

B. Saha ◽

S. Das ◽

K.K. Chattopadhyay

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Cadmium Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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