A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

2014 ◽  
Vol 85 (4) ◽  
pp. 043509 ◽  
Author(s):  
S. Sharma ◽  
D. Gahan ◽  
S. Kechkar ◽  
S. Daniels ◽  
M. B. Hopkins
Keyword(s):  
Field Energy ◽  
Energy Analyzer ◽  
Semiconductor Wafer ◽  
Spatially Resolved

An Energy Resolution Formula of a Three Plane Grids Retarding Field Energy Analyzer

1985 ◽  
Vol 24 (Part 1, No. 3) ◽  
pp. 337-341 ◽  
Author(s):  
Yoshiyuki Sakai ◽  
Ituso Katsumata
Keyword(s):  
Energy Resolution ◽  
Field Energy ◽  
Energy Analyzer

scholarly journals System for voltage control and for data acquisition of retarding field energy analyzer

2018 ◽  
Author(s):  
M. Brombin ◽  
R. Cavazzana ◽  
B. Laterza ◽  
G. Moro ◽  
R. Pasqualotto ◽  
...  
Keyword(s):  
Data Acquisition ◽  
Voltage Control ◽  
Field Energy ◽  
Energy Analyzer

Spatial retarding field energy analyzer measurements downstream of a helicon double layer plasma

2008 ◽  
Vol 93 (7) ◽  
pp. 071505 ◽  
Author(s):  
W. Cox ◽  
C. Charles ◽  
R. W. Boswell ◽  
R. Hawkins
Keyword(s):  
Double Layer ◽  
Field Energy ◽  
Energy Analyzer

Experimental analysis of a new retarding field energy analyzer

2015 ◽  
Vol 785 ◽  
pp. 123-128
Author(s):  
Yu-Xiang Wei ◽  
Shu-Qing Liu ◽  
Xian-Xia Li ◽  
Hong-Li Shen ◽  
Ming-Guang Huang ◽  
...  
Keyword(s):  
Experimental Analysis ◽  
Field Energy ◽  
Energy Analyzer

Retarding field energy analyzer for the Saskatchewan Torus–Modified plasma boundary

2009 ◽  
Vol 80 (10) ◽  
pp. 103505 ◽  
Author(s):  
M. Dreval ◽  
D. Rohraff ◽  
C. Xiao ◽  
A. Hirose
Keyword(s):  
Plasma Boundary ◽  
Field Energy ◽  
Energy Analyzer
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