In-situ scanning electron microscope observation of electromigration-induced void growth in 30 nm ½ pitch Cu interconnect structures

K. Vanstreels; P. Czarnecki; T. Kirimura; Y. K. Siew; I. De Wolf; J. Bömmels; Zs. Tőkei; K. Croes

doi:10.1063/1.4866330

In-situ scanning electron microscope observation of electromigration-induced void growth in 30 nm ½ pitch Cu interconnect structures

Journal of Applied Physics ◽

10.1063/1.4866330 ◽

2014 ◽

Vol 115 (7) ◽

pp. 074305 ◽

Cited By ~ 2

Author(s):

K. Vanstreels ◽

P. Czarnecki ◽

T. Kirimura ◽

Y. K. Siew ◽

I. De Wolf ◽

...

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Void Growth ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Cu Interconnect ◽

Scanning Electron

Download Full-text

In-situ scanning electron microscope observation of electrode reactions related to battery material

Electrochimica Acta ◽

10.1016/j.electacta.2019.06.165 ◽

2019 ◽

Vol 319 ◽

pp. 158-163 ◽

Cited By ~ 5

Author(s):

Tetsuya Tsuda ◽

Kei Hosoya ◽

Teruki Sano ◽

Susumu Kuwabata

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Electrode Reactions ◽

Battery Material ◽

Scanning Electron

Download Full-text

Effect of ZnDTP triboflim's morphology on friction behaviors of DLC coatings: Tribofilm characterization by 3D scanning electron microscope observation

Journal of Advanced Mechanical Design Systems and Manufacturing ◽

10.1299/jamdsm.2018jamdsm0129 ◽

2018 ◽

Vol 12 (7) ◽

pp. JAMDSM0129-JAMDSM0129 ◽

Cited By ~ 2

Author(s):

Kouami Auxence Melardot ABOUA ◽

Noritsugu UMEHARA ◽

Hiroyuki KOUSAKA ◽

Takayuki TOKOROYAMA ◽

Motoyuki MURASHIMA ◽

...

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

3D Scanning ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Dlc Coatings ◽

Scanning Electron Microscope Observation ◽

Scanning Electron

Download Full-text

Scanning Electron Microscope Observation of the Morphological Change in Ventral Organ of Rice Embryo during Embryogenesis and Germination.

Japanese Journal of Crop Science ◽

10.1626/jcs.60.407 ◽

1991 ◽

Vol 60 (3) ◽

pp. 407-412 ◽

Cited By ~ 3

Author(s):

Katsumi SUZUKI ◽

Takeshi TANIGUCHI ◽

Eizo MAEDA

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Morphological Change ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Scanning Electron ◽

Rice Embryo

Download Full-text

Scanning electron microscope observation of dislocations in olivine

Physics and Chemistry of Minerals ◽

10.1007/bf00307989 ◽

1987 ◽

Vol 14 (3) ◽

pp. 245-248 ◽

Cited By ~ 51

Author(s):

S. Karato

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Scanning Electron

Download Full-text

Scanning Electron Microscope Observation of Abnormal Flowers and Their Frequency in Avocado Trees

Engei Gakkai zasshi ◽

10.2503/jjshs.59.703 ◽

1991 ◽

Vol 59 (4) ◽

pp. 703-710 ◽

Cited By ~ 1

Author(s):

Hiroaki Inoue ◽

Bunjiro Takahashi

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Scanning Electron

Download Full-text

SCANNING ELECTRON MICROSCOPE OBSERVATION OF PENILE VASCULAR CASTS IN THE DOG: AN INQUIRY INTO THE POSSIBLE MECHANISM OF ERECTION BASED ON THE FINDINGS

Biomedical Research ◽

10.2220/biomedres.8.269 ◽

1987 ◽

Vol 8 (4) ◽

pp. 269-280 ◽

Cited By ~ 8

Author(s):

KEN-ICHI KANO ◽

SHUGO HANYU ◽

TOSHIHIKO IWANAGA ◽

SHOTARO SATO

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Vascular Casts ◽

Scanning Electron

Download Full-text

Scanning Electron Microscope Observation of Concentration Profile in Ionic Liquid Caused by Electrochemical Reactions

ECS Meeting Abstracts ◽

10.1149/ma2009-02/41/3078 ◽

2009 ◽

Keyword(s):

Ionic Liquid ◽

Electron Microscope ◽

Scanning Electron Microscope ◽

Concentration Profile ◽

Microscope Observation ◽

Electrochemical Reactions ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Scanning Electron

Download Full-text

Scanning Electron Microscope Observation of Ridge Structures Formed on (100) and (110) Gd3Ga5O12Substrates

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l911 ◽

1993 ◽

Vol 32 (Part 2, No. 7A) ◽

pp. L911-L913

Author(s):

Yujiro Katoh ◽

Naoto Sugimoto ◽

Akiyuki Tate

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Ridge Structures ◽

Scanning Electron

Download Full-text

Phase morphology of polymer blends: scanning electron microscope observation by backscattering from a microtomed and stained surface

Polymer ◽

10.1016/0032-3861(92)90357-3 ◽

1992 ◽

Vol 33 (4) ◽

pp. 886-888 ◽

Cited By ~ 21

Author(s):

Graciela Goizueta ◽

Tsuneo Chiba ◽

Takashi Inoue

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Polymer Blends ◽

Phase Morphology ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Scanning Electron

Download Full-text

Nanomanipulation of biological samples using a compact atomic force microscope under scanning electron microscope observation

Journal of Electron Microscopy ◽

10.1093/jmicro/dfr070 ◽

2011 ◽

Vol 60 (6) ◽

pp. 359-366 ◽

Cited By ~ 21

Author(s):

F. Iwata ◽

Y. Mizuguchi ◽

H. Ko ◽

T. Ushiki

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Atomic Force Microscope ◽

Biological Samples ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Scanning Electron Microscope Observation ◽

Atomic Force ◽

Scanning Electron

Download Full-text