Development of fast heating electron beam annealing setup for ultra high vacuum chamber

2014 ◽  
Vol 85 (2) ◽  
pp. 025107 ◽  
Author(s):  
Sadhan Chandra Das ◽  
Abhijit Majumdar ◽  
Sumant Katiyal ◽  
T. Shripathi ◽  
R. Hippler
Keyword(s):  
Electron Beam ◽  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Fast Heating ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

Ultra-high-vacuum chamber

Vacuum ◽  
1965 ◽  
Vol 15 (7) ◽  
pp. 372-373
Author(s):  
CONSOLIDATEDVACUUMCORPORATION
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

Fabrication of Nanocrystalline Si by SiH4 Plasma Cell

1995 ◽  
Vol 377 ◽  
Author(s):  
Masanori Otobe ◽  
Tomonori Kanai ◽  
Shunri Oda
Keyword(s):  
Plasma Cell ◽  
Vacuum Chamber ◽  
High Vacuum ◽  
Nanocrystalline Silicon ◽  
Ultra High Vacuum ◽  
Very High Frequency ◽  
Transmission Electron Microscopy Measurement ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber ◽  
Nanocrystalline Si

ABSTRACTNanocrystalline silicon (nc-Si) has been fabricated by a very-high-frequency plasma cell attached to an ultra-high-vacuum chamber using SiH4 gas. Nanocrystalline Si is formed in the gas phase of the plasma cell and is extracted out of plasma cell through the orifice to the ultra-high-vacuum chamber. The shape of nc-Si is spherical or octahedral with the diameter of 3–30nm. Giant Si particles about 100nm in diameter are also formed at the lower cell pressure condition. A 1000keV transmission electron microscopy measurement has revealed that the core region of giant Si particle with the diameter about 30nm was crystalline and the shell region is amorphous. We have demonstrated that the spread of particle size can be decreased using pulsed gas supply of H2 into SiH4 plasma.

scholarly journals Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes

2015 ◽  
Vol 24 (3) ◽  
pp. 035003 ◽  
Author(s):  
A Dolgov ◽  
O Yakushev ◽  
A Abrikosov ◽  
E Snegirev ◽  
V M Krivtsun ◽  
...  
Keyword(s):  
Vacuum Chamber ◽  
Extreme Ultraviolet ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

scholarly journals Additively manufactured ultra-high vacuum chamber for portable quantum technologies

2021 ◽  
Vol 40 ◽  
pp. 101898
Author(s):  
N. Cooper ◽  
L.A. Coles ◽  
S. Everton ◽  
I. Maskery ◽  
R.P. Campion ◽  
...  
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

Recent study of nanomaterials prepared by inert gas condensation using ultra high vacuum chamber

Pramana ◽  
2005 ◽  
Vol 65 (5) ◽  
pp. 881-891 ◽  
Author(s):  
S. Ramasamy ◽  
D. J. Smith ◽  
P. Thangadurai ◽  
K. Ravichandran ◽  
T. Prakash ◽  
...  
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Inert Gas ◽  
Gas Condensation ◽  
Inert Gas Condensation ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

Ultra-High-Vacuum Chamber for Environmental-Fatigue Testing

1995 ◽  
Vol 23 (4) ◽  
pp. 275 ◽  
Author(s):  
DR Petersen ◽  
RE Link ◽  
J Ruiz ◽  
M Elices
Keyword(s):  
Vacuum Chamber ◽  
Fatigue Testing ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

An ultra-high-vacuum chamber for a Philips EM430 stem

1989 ◽  
Vol 31 (4) ◽  
pp. 458-459
Author(s):  
A.J. Bleeker ◽  
F.J. Pijper ◽  
P. Kruit
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber

An ultra-high vacuum chamber for scattering experiments featuring in-vacuum continuous in-plane variation of the angle between entrance and exit vacuum ports

2015 ◽  
Vol 86 (9) ◽  
pp. 095110 ◽  
Author(s):  
Carl-Johan Englund ◽  
Marcus Agåker ◽  
Pierre Fredriksson ◽  
Anders Olsson ◽  
Niklas Johansson ◽  
...  
Keyword(s):  
Vacuum Chamber ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Vacuum Chamber ◽  
Ultra High Vacuum Chamber
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