Interface-reaction-limited growth of thermal oxides on 4H-SiC (0001) in nanometer-thick region
2015 ◽
Vol 54
(9)
◽
pp. 098002
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1981 ◽
Vol 31
(1)
◽
pp. 235-240
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Keyword(s):
Keyword(s):
2002 ◽
Vol 38
(3)
◽
pp. 513-519
◽
Keyword(s):
Keyword(s):