Characterization of in situ SiNx thin film grown on AlN/GaN heterostructure by metal-organic chemical vapor deposition

2014 ◽  
Vol 104 (3) ◽  
pp. 032903 ◽  
Author(s):  
Xing Lu ◽  
Jun Ma ◽  
Huaxing Jiang ◽  
Kei May Lau
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Gan Heterostructure ◽  
Organic Chemical Vapor Deposition

Preparation and characterization of α-Fe2O3 nanorod-thin film by metal–organic chemical vapor deposition

2009 ◽  
Vol 517 (5) ◽  
pp. 1853-1856 ◽  
Author(s):  
Hyun Gil Cha ◽  
Chang Woo Kim ◽  
Young Hwan Kim ◽  
Mi Hyang Jung ◽  
Eun Sun Ji ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Growth and characterization of N-polar GaN films on SiC by metal organic chemical vapor deposition

2008 ◽  
Vol 104 (2) ◽  
pp. 024301 ◽  
Author(s):  
David F. Brown ◽  
Stacia Keller ◽  
Feng Wu ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Preparation and Characterization of Epitaxial LiNbO3Thin Films by Metal-Organic Chemical Vapor Deposition

1999 ◽  
Vol 38 (Part 1, No. 9B) ◽  
pp. 5437-5441 ◽  
Author(s):  
Kosuke Shiratsuyu ◽  
Atsushi Sakurai ◽  
Katsuhiko Tanaka ◽  
Yukio Sakabe
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document