scholarly journals Ultra-high heat flux cooling characteristics of cryogenic micro-solid nitrogen particles and its application to semiconductor wafer cleaning technology

2014 ◽  
Author(s):  
Jun Ishimoto ◽  
U Oh ◽  
Zhao Guanghan ◽  
Tomoki Koike ◽  
Naoya Ochiai
Keyword(s):  
Heat Flux ◽  
High Heat ◽  
High Heat Flux ◽  
Semiconductor Wafer ◽  
Wafer Cleaning ◽  
Solid Nitrogen ◽  
Cleaning Technology

STABLE, CALM, AND HIGH-HEAT-FLUX HEAT REMOVAL USING A POROUS-MICRO-CHANNEL

2017 ◽  
Author(s):  
Tomio Okawa ◽  
Junki Ohashi ◽  
Ryo Hirata ◽  
Koji Enoki
Keyword(s):  
Heat Flux ◽  
Heat Removal ◽  
High Heat ◽  
High Heat Flux ◽  
Micro Channel

FLAT PLATE PULSATING HEAT PIPES WITH DIFFERENT CHANNEL GEOMETRIES FOR HIGH HEAT FLUX APPLICATIONS

2020 ◽  
Author(s):  
Larissa Krambeck ◽  
Kelvin Guessi Domiciano ◽  
Luis Alonso Betancur Arboleda ◽  
Marcia Mantelli
Keyword(s):  
Heat Flux ◽  
Flat Plate ◽  
Heat Pipes ◽  
High Heat ◽  
High Heat Flux
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