Cross Sections for Inner-Shell Ionization by Electron Impact

2014 ◽  
Vol 43 (1) ◽  
pp. 013102 ◽  
Author(s):  
Xavier Llovet ◽  
Cedric J. Powell ◽  
Francesc Salvat ◽  
Aleksander Jablonski
Author(s):  
Raynald Gauvin ◽  
Gilles L'Espérance

Values of cross sections for ionization of inner-shell electrons by electron impact are required for electron probe microanalysis, Auger-electron spectroscopy and electron energy-loss spectroscopy. In this work, the results of the measurement of inner-shell ionization cross-sections by electron impact, Q, in a TEM are presented for the K shell.The measurement of QNi has been performed at 120 KeV in a TEM by measuring the net X-ray intensity of the Kα line of Ni, INi, which is related to QNi by the relation :(1)where i is the total electron dose, (Ω/4π)is the fractional solid angle, ω is the fluorescence yield, α is the relative intensity factor, ε is the Si (Li) detector efficiency, A is the atomic weight, ρ is the sample density, No is Avogadro's number, t' is the distance traveled by the electrons in the specimen which is equal to τ sec θ neglecting beam broadening where τ is the specimen thickness and θ is the angle between the electron beam and the normal of the thin foil and CNi is the weight fraction of Ni.


2006 ◽  
Vol 12 (S02) ◽  
pp. 844-845
Author(s):  
X Llovet ◽  
C Merlet ◽  
D Bote ◽  
JM Fernández-Varea ◽  
F Salvat

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006


1999 ◽  
Vol 5 (S2) ◽  
pp. 584-585
Author(s):  
X. Llovet ◽  
C. Merlet ◽  
J.M. Fernández-Varea ◽  
F. Salvat

Knowledge of inner-shell ionization cross sections by electron impact is needed for quantitative procedures in electron probe microanalysis (EPMA) and Auger electron spectroscopy (AES) The common practice is to use semi-empirical formulas, based on the asymptotic limit of the Bethe theory, which sometimes are used beyond their domain of validity. Experimental measurements of ionization cross sections are scarce and affected by considerable uncertainties, thus a mere comparison with experimental data does not permit to draw a definite conclusion abou the accuracy of the various formulas. In this communication, we present new measurements o the relative variation of K- and L-shell ionization cross sections deduced from the counting rate of characteristic x-rays emitted by extremely thin films of Cr, Ni, Cu, Te, Au and Bi bombardec by keV electrons.The studied films were produced by thermal evaporation on backing self-supported 30 nm carbon films.


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