Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses

2013 ◽  
Vol 114 (19) ◽  
pp. 194903 ◽  
Author(s):  
Laura Gemini ◽  
Masaki Hashida ◽  
Masahiro Shimizu ◽  
Yasuhiro Miyasaka ◽  
Shunsuke Inoue ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Self Organization ◽  
Periodic Nanostructures

Formation of Nanovoids in Femtosecond Laser-Irradiated Single Crystals of Silicon Carbide

2012 ◽  
Vol 725 ◽  
pp. 19-22 ◽  
Author(s):  
Tatsuya Okada ◽  
Takuro Tomita ◽  
Shigeki Matsuo ◽  
Shuichi Hashimoto ◽  
Ryota Kashino ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Three Dimensional ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Formation Mechanisms ◽  
Strained Layers ◽  
Tomographic Images ◽  
Scanning Transmission ◽  
Periodic Microstructures

Scanning transmission electron microscopy was carried out to study the three-dimensional microstructures of periodic strained layers induced by the irradiation of femtosecond laser pulses inside a silicon carbide single crystal. The cross section of laser-irradiated line consisted of a shell-shaped modified region surrounding a core region with no modification. The laser-modified region was composed of strained layers with a typical spacing of 200 nm. Nanovoids from 10 nm to 20 nm in diameter were observed. Three-dimensional tomographic images clearly show the plate-like shape of strained layers extending parallel to the electric field of the laser light and the random distribution of nanovoids in the strained layers. The three-dimensional observation provides insight into the formation mechanisms of periodic microstructures.

Silicon carbide nanocrystals produced by femtosecond laser pulses

2018 ◽  
Vol 81 ◽  
pp. 96-102 ◽  
Author(s):  
Sára Tóth ◽  
Péter Németh ◽  
Péter Rácz ◽  
László Himics ◽  
Péter Dombi ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Periodic Nanostructures and Optical Properties of InP Induced by Femtosecond Laser Pulses

2013 ◽  
Vol 5 (12) ◽  
pp. 1274-1277
Author(s):  
Shanshan Tian ◽  
Zhipeng Wei ◽  
Haifeng Zhao ◽  
Xian Gao ◽  
Xuan Fang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Periodic Nanostructures

scholarly journals Femtosecond Laser-Based Modification of PDMS to Electrically Conductive Silicon Carbide

Nanomaterials ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 558 ◽  
Author(s):  
Yasutaka Nakajima ◽  
Shuichiro Hayashi ◽  
Akito Katayama ◽  
Nikolay Nedyalkov ◽  
Mitsuhiro Terakawa
Keyword(s):  
Electrical Conductivity ◽  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Scanning Speed ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Mems Devices ◽  
Direct Writing ◽  
X Ray Diffraction ◽  
Electrically Conductive

In this paper, we experimentally demonstrate femtosecond laser direct writing of conductive structures on the surface of native polydimethylsiloxane (PDMS). Irradiation of femtosecond laser pulses modified the PDMS to black structures, which exhibit electrical conductivity. Fourier-transform infrared (FTIR) and X-ray diffraction (XRD) results show that the black structures were composed of β-silicon carbide (β-SiC), which can be attributed to the pyrolysis of the PDMS. The electrical conductivity was exhibited in limited laser power and scanning speed conditions. The technique we present enables the spatially selective formation of β-SiC on the surface of native PDMS only by irradiation of femtosecond laser pulses. Furthermore, this technique has the potential to open a novel route to simply fabricate flexible/stretchable MEMS devices with SiC microstructures.

Formation of periodic nanostructures on aluminum surface by femtosecond laser pulses

2011 ◽  
Vol 6 (3-4) ◽  
pp. 237-243 ◽  
Author(s):  
E. V. Golosov ◽  
A. A. Ionin ◽  
Yu. R. Kolobov ◽  
S. I. Kudryashov ◽  
A. E. Ligachev ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Aluminum Surface ◽  
Periodic Nanostructures

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

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