Resistance and dopant profiling along freestanding GaAs nanowires

2013 ◽  
Vol 103 (14) ◽  
pp. 143104 ◽  
Author(s):  
Stefan Korte ◽  
Matthias Steidl ◽  
Werner Prost ◽  
Vasily Cherepanov ◽  
Bert Voigtländer ◽  
...  
Author(s):  
Jing-jiang Yu ◽  
T. Yamaoka ◽  
T. Aiso ◽  
K. Watanabe ◽  
Y. Shikakura ◽  
...  

Abstract Scanning nonlinear dielectric microscopy is continuously developed as an AFM-derived method for 2D dopant profiling of semiconductor devices. In this paper, the authors apply 2D carrier density mapping to Si and SiC and succeed a high resolution observation of the SiC planar power MOSFET. Furthermore, they develop software that combines dC/dV and dC/dz images and expresses both density and polarity in a single distribution image. The discussion provides the details of AFM experiments that were conducted using a Hitachi environmental control AFM5300E system. The results indicated that the carrier density decreases in the boundary region between n plus source and p body. The authors conclude that although the resolutions of dC/dV and dC/dz are estimated to be 20 nm or less and 30 nm or less, respectively, there is a possibility that the resolution can be further improved by using a sharpened probe.


Author(s):  
Benedict Drevniok ◽  
St. John Dixon-Warren ◽  
Oskar Amster ◽  
Stuart L Friedman ◽  
Yongliang Yang

Abstract Scanning microwave impedance microscopy was used to analyze a CMOS image sensor sample to reveal details of the dopant profiling in planar and cross-sectional samples. Sitespecific capacitance-voltage spectroscopy was performed on different regions of the samples.


2021 ◽  
pp. 2104671
Author(s):  
Bin Zhang ◽  
Jan E. Stehr ◽  
Ping‐Ping Chen ◽  
Xingjun Wang ◽  
Fumitaro Ishikawa ◽  
...  

Nanomaterials ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 1681
Author(s):  
Hadi Hijazi ◽  
Vladimir G. Dubrovskii

The vapor–liquid–solid growth of III-V nanowires proceeds via the mononuclear regime, where only one island nucleates in each nanowire monolayer. The expansion of the monolayer is governed by the surface energetics depending on the monolayer size. Here, we study theoretically the role of surface energy in determining the monolayer morphology at a given coverage. The optimal monolayer configuration is obtained by minimizing the surface energy at different coverages for a set of energetic constants relevant for GaAs nanowires. In contrast to what has been assumed so far in the growth modeling of III-V nanowires, we find that the monolayer expansion may not be a continuous process. Rather, some portions of the already formed monolayer may dissolve on one of its sides, with simultaneous growth proceeding on the other side. These results are important for fundamental understanding of vapor–liquid–solid growth at the atomic level and have potential impacts on the statistics within the nanowire ensembles, crystal phase, and doping properties of III-V nanowires.


Nano Letters ◽  
2019 ◽  
Vol 19 (6) ◽  
pp. 3498-3504 ◽  
Author(s):  
Marcus Tornberg ◽  
Daniel Jacobsson ◽  
Axel R. Persson ◽  
Reine Wallenberg ◽  
Kimberly A. Dick ◽  
...  
Keyword(s):  

Nanomaterials ◽  
2017 ◽  
Vol 7 (9) ◽  
pp. 275 ◽  
Author(s):  
Filippo Giubileo ◽  
Antonio Di Bartolomeo ◽  
Laura Iemmo ◽  
Giuseppe Luongo ◽  
Maurizio Passacantando ◽  
...  

2011 ◽  
Vol 99 (8) ◽  
pp. 083114 ◽  
Author(s):  
Ning Han ◽  
Alvin T. Hui ◽  
Fengyun Wang ◽  
Jared J. Hou ◽  
Fei Xiu ◽  
...  

Nano Letters ◽  
2010 ◽  
Vol 10 (5) ◽  
pp. 1836-1841 ◽  
Author(s):  
M. R. Ramdani ◽  
E. Gil ◽  
Ch. Leroux ◽  
Y. André ◽  
A. Trassoudaine ◽  
...  
Keyword(s):  

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