Formation of low resistance ohmic contacts in GaN-based high electron mobility transistors with BCl3 surface plasma treatment

2013 ◽  
Vol 103 (8) ◽  
pp. 083508 ◽  
Author(s):  
Tatsuya Fujishima ◽  
Sameer Joglekar ◽  
Daniel Piedra ◽  
Hyung-Seok Lee ◽  
Yuhao Zhang ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Electron Mobility ◽  
Ohmic Contacts ◽  
High Electron Mobility Transistors ◽  
High Electron ◽  
Surface Plasma ◽  
High Electron Mobility ◽  
Low Resistance ◽  
Electron Mobility Transistors

scholarly journals AlGaN/GaN High Electron Mobility Transistors on Semi-Insulating Ammono-GaN Substrates with Regrown Ohmic Contacts

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 546 ◽  
Author(s):  
Wojciech Wojtasiak ◽  
Marcin Góralczyk ◽  
Daniel Gryglewski ◽  
Marcin Zając ◽  
Robert Kucharski ◽  
...  
Keyword(s):  
Electron Mobility ◽  
Ohmic Contacts ◽  
High Electron Mobility Transistors ◽  
High Electron Mobility Transistor ◽  
Maximum Output ◽  
High Electron ◽  
Output Current ◽  
High Electron Mobility ◽  
Electron Mobility Transistors ◽  
Access Resistance

AlGaN/GaN high electron mobility transistors on semi-insulating bulk ammonothermal GaN have been investigated. By application of regrown ohmic contacts, the problem with obtaining low resistance ohmic contacts to low-dislocation high electron mobility transistor (HEMT) structures was solved. The maximum output current was about 1 A/mm and contact resistances was in the range of 0.3–0.6 Ω ·mm. Good microwave performance was obtained due to the absence of parasitic elements such as high access resistance.

Implantation angle periphery effects on non-alloyed Si-implanted ohmic contacts for AlGaN/GaN high electron mobility transistors

2011 ◽  
Vol 56 (1) ◽  
pp. 56-59
Author(s):  
Martin Kocan ◽  
Felix Recht ◽  
Gilberto A. Umana-Membreno ◽  
Matt R. Kilburn ◽  
Brett D. Nener ◽  
...  
Keyword(s):  
Electron Mobility ◽  
Ohmic Contacts ◽  
High Electron Mobility Transistors ◽  
High Electron ◽  
High Electron Mobility ◽  
Electron Mobility Transistors

Properties of Ohmic Contacts to Heterojunction Transistors

1990 ◽  
Vol 181 ◽  
Author(s):  
H. Barry Harrison
Keyword(s):  
Physical Properties ◽  
Electron Mobility ◽  
Ohmic Contacts ◽  
High Electron Mobility Transistors ◽  
High Electron ◽  
High Electron Mobility ◽  
Electron Mobility Transistors ◽  
Active Channel ◽  
Heterojunction Transistors

ABSTRACTThe electrical and physical properties of the contact between the active channel of high electron mobility transistors (HEMT’s) and the source or drain contacts play an important role in determining the transistor characteristics. This paper considers electrical models that may be applied to the various techniques now available to form these Interconnections. Results of electrical (and some physical) studies with regard to these systems are then discussed and compared where possible with predictions made using the electrical models. The comparisons show that the electrical models provide a useful base to identify the important parameters in these interconnections.

Low-Contact-Resistance Non-Gold Ta/Si/Ti/Al/Ni/Ta Ohmic Contacts on Undoped AlGaN/GaN High-Electron-Mobility Transistors Grown on Silicon

2013 ◽  
Vol 6 (11) ◽  
pp. 116501 ◽  
Author(s):  
Yang Li ◽  
Geok Ing Ng ◽  
Subramaniam Arulkumaran ◽  
Chandra Mohan Manoj Kumar ◽  
Kian Siong Ang ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Electron Mobility ◽  
Ohmic Contacts ◽  
High Electron Mobility Transistors ◽  
High Electron ◽  
High Electron Mobility ◽  
Electron Mobility Transistors

Impact of oxygen plasma treatment on the dynamic on-resistance of AlGaN/GaN high-electron-mobility transistors

2015 ◽  
Vol 8 (11) ◽  
pp. 111001 ◽  
Author(s):  
Joel T. Asubar ◽  
Yoshiki Sakaida ◽  
Satoshi Yoshida ◽  
Zenji Yatabe ◽  
Hirokuni Tokuda ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Electron Mobility ◽  
Oxygen Plasma ◽  
High Electron Mobility Transistors ◽  
Oxygen Plasma Treatment ◽  
High Electron ◽  
High Electron Mobility ◽  
Electron Mobility Transistors
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