Effect of oxygen pressure on the structural and optical properties of ZnO/Si(100) thin films

Author(s):  
Sanjeev Gautam ◽  
Anup Thakur ◽  
Ankush Vij ◽  
Seonghoon Jung ◽  
Ik Jae Lee ◽  
...  
2016 ◽  
Vol 619 ◽  
pp. 86-90 ◽  
Author(s):  
Firdous A. Tantray ◽  
Arpana Agrawal ◽  
Mukul Gupta ◽  
Joseph T. Andrews ◽  
Pratima Sen

2009 ◽  
Vol 23 (09) ◽  
pp. 2233-2251 ◽  
Author(s):  
MANUEL GARCÍA-MÉNDEZ ◽  
SANTOS MORALES-RODRÍGUEZ ◽  
DONALD H. GALVÁN ◽  
ROBERTO MACHORRO

A set of AlN thin films was prepared by reactive magnetron sputtering at room temperature. The effect of oxygen impurities on the structural and optical properties of AlN films is discussed. The structural and optical properties were characterized using X-ray diffraction (XRD) and spectroscopic ellipsometry, respectively. Depending on the deposition conditions, films can grow hexagonal (würzite, P 63 m 3) or cubic (zinc-blende, Fm3m) in microstructure. From the optical measurements, the ellipsometric parameters (ψ, Δ) and the real refractive index as a function of energy were obtained. From the ellipsometric measurements, a model of Lorentz single-oscillator was employed to estimate the optical band gap, Eg. In the theoretical part, a calculation of density of states (DOS) and band structure was performed to be compared with the experimental results.


2016 ◽  
Vol 755 ◽  
pp. 012053
Author(s):  
Firdous A Tantray ◽  
Romita Chouhan ◽  
Swati Rajput ◽  
Arpana Agrawal ◽  
Joseph T Andrews ◽  
...  

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