High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-κ insulators (κ = 2.0-2.5)

2013 ◽  
Vol 102 (17) ◽  
pp. 172908 ◽  
Author(s):  
V. V. Afanas'ev ◽  
A. P. D. Nguyen ◽  
M. Houssa ◽  
A. Stesmans ◽  
Zs. Tőkei ◽  
...  
Keyword(s):  
Electron Spin Resonance ◽  
High Resolution ◽  
Electron Spin ◽  
Ion Bombardment ◽  
Resonance Analysis ◽  
Resolution Electron ◽  
Spin Resonance ◽  
Induced Defects

Electron spin resonance analysis of sputtering-induced defects in advanced low-κ insulators (κ=2.0–2.5)

2013 ◽  
Vol 109 ◽  
pp. 240-243
Author(s):  
A. Stesmans ◽  
A.P.D. Nguyen ◽  
M. Houssa ◽  
V.V. Afanas’ev ◽  
Zs. Tőkei ◽  
...  
Keyword(s):  
Electron Spin Resonance ◽  
Electron Spin ◽  
Resonance Analysis ◽  
Spin Resonance ◽  
Induced Defects

High resolution electron spin resonance microscopy

2003 ◽  
Vol 165 (1) ◽  
pp. 116-127 ◽  
Author(s):  
Aharon Blank ◽  
Curt R. Dunnam ◽  
Peter P. Borbat ◽  
Jack H. Freed
Keyword(s):  
Electron Spin Resonance ◽  
High Resolution ◽  
Electron Spin ◽  
Resolution Electron ◽  
Spin Resonance

Analysis of high resolution electron spin resonance spectra

1962 ◽  
Vol 5 (6) ◽  
pp. 615-619 ◽  
Author(s):  
J.R. Bolton ◽  
A. Carrington ◽  
J. dos Santos-Veiga
Keyword(s):  
Electron Spin Resonance ◽  
High Resolution ◽  
Electron Spin ◽  
Resolution Electron ◽  
Spin Resonance

High-resolution electron spin resonance studies of hyperfine interactions in substituted 1,4-naphthoquinones and naphthazarins

1967 ◽  
Vol 71 (1) ◽  
pp. 29-37 ◽  
Author(s):  
Lawrence H. Piette ◽  
M. Okamura ◽  
Gary P. Rabold ◽  
Ronald T. Ogata ◽  
Richard E. Moore ◽  
...  
Keyword(s):  
Electron Spin Resonance ◽  
High Resolution ◽  
Electron Spin ◽  
Hyperfine Interactions ◽  
Resolution Electron ◽  
Spin Resonance
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