Analysis of micro-Raman spectra combined with electromagnetic simulation and stress simulation for local stress distribution in Si devices
Keyword(s):
2005 ◽
Vol 490-491
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pp. 35-40
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2012 ◽
Vol 23
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pp. 109-111
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2010 ◽
Vol 163-167
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pp. 1620-1625
Keyword(s):
Keyword(s):
2008 ◽
Vol 11
(4)
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pp. 285-291
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