Design and implementation of an integral wall-mounted quartz crystal microbalance for atomic layer deposition

2012 ◽  
Vol 83 (9) ◽  
pp. 094101 ◽  
Author(s):  
Shannon C. Riha ◽  
Joseph A. Libera ◽  
Jeffrey W. Elam ◽  
Alex B. F. Martinson
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Design And Implementation ◽  
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Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6

2005 ◽  
Vol 488 (1-2) ◽  
pp. 103-110 ◽  
Author(s):  
F.H. Fabreguette ◽  
Z.A. Sechrist ◽  
J.W. Elam ◽  
S.M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Atomic Layer Deposition of Ternary Compounds on Cu(In,Ga)Se2: An In Situ Quartz Crystal Microbalance Study

2020 ◽  
Vol 3 (7) ◽  
pp. 7208-7215
Author(s):  
Fredrik Larsson ◽  
Lars Stolt ◽  
Adam Hultqvist ◽  
Marika Edoff ◽  
Jan Keller ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Ternary Compounds ◽  
Layer Deposition
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