Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

Li Wang; Bernd Terhalle; Vitaliy A. Guzenko; Alan Farhan; Mohamad Hojeij; Yasin Ekinci

doi:10.1063/1.4748758

Generation of high-resolution kagome lattice structures using extreme ultraviolet interference lithography

Applied Physics Letters ◽

10.1063/1.4748758 ◽

2012 ◽

Vol 101 (9) ◽

pp. 093104 ◽

Cited By ~ 22

Author(s):

Li Wang ◽

Bernd Terhalle ◽

Vitaliy A. Guzenko ◽

Alan Farhan ◽

Mohamad Hojeij ◽

...

Keyword(s):

High Resolution ◽

Extreme Ultraviolet ◽

Interference Lithography ◽

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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Printing and characterisation of Kagome lattice structures by fused deposition modelling

Materials & Design ◽

10.1016/j.matdes.2017.10.022 ◽

2018 ◽

Vol 137 ◽

pp. 266-275 ◽

Cited By ~ 24

Author(s):

Rinoj Gautam ◽

Sridhar Idapalapati ◽

Stefanie Feih

Keyword(s):

Fused Deposition Modelling ◽

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice ◽

Fused Deposition

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Facile fabrication of high-resolution extreme ultraviolet interference lithography grating masks using footing strategy during electron beam writing

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4822016 ◽

2013 ◽

Vol 31 (6) ◽

pp. 06F602 ◽

Cited By ~ 4

Author(s):

Li Wang ◽

Daniel Fan ◽

Vitaliy A. Guzenko ◽

Yasin Ekinci

Keyword(s):

Electron Beam ◽

High Resolution ◽

Extreme Ultraviolet ◽

Interference Lithography ◽

Facile Fabrication

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Single member actuation of kagome lattice structures

Journal of Mechanics of Materials and Structures ◽

10.2140/jomms.2007.2.303 ◽

2007 ◽

Vol 2 (2) ◽

pp. 303-317 ◽

Cited By ~ 8

Author(s):

Anthony Leung ◽

Simon Guest

Keyword(s):

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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Anisotropic magnetic interactions in hexagonal AB -stacked kagome lattice structures: Application to Mn3X ( X=Ge,Sn,Ga ) compounds

Physical Review B ◽

10.1103/physrevb.103.144401 ◽

2021 ◽

Vol 103 (14) ◽

Author(s):

A. Zelenskiy ◽

T. L. Monchesky ◽

M. L. Plumer ◽

B. W. Southern

Keyword(s):

Magnetic Interactions ◽

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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Actuation-softening in kagome lattice structures

47th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference<BR> 14th AIAA/ASME/AHS Adaptive Structures Conference<BR> 7th ◽

10.2514/6.2006-1888 ◽

2006 ◽

Cited By ~ 1

Author(s):

Anthony Leung ◽

Simon Guest

Keyword(s):

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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Flow and heat transfer characteristics of a staggered array of Kagome lattice structures in rectangular channels

Heat and Mass Transfer ◽

10.1007/s00231-021-03100-2 ◽

2021 ◽

Author(s):

Liang Xu ◽

Hanghang Chen ◽

Lei Xi ◽

Yanhong Xiong ◽

Jianmin Gao ◽

...

Keyword(s):

Heat Transfer ◽

Lattice Structures ◽

Kagome Lattice ◽

Heat Transfer Characteristics ◽

Kagomé Lattice ◽

Transfer Characteristics ◽

Flow And Heat Transfer ◽

Rectangular Channels

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Heat transfer enhancement of wedge-shaped channels by replacing pin fins with Kagome lattice structures

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2019.06.059 ◽

2019 ◽

Vol 141 ◽

pp. 88-101 ◽

Cited By ~ 6

Author(s):

Beibei Shen ◽

Yang Li ◽

Hongbin Yan ◽

Sandra K.S. Boetcher ◽

Gongnan Xie

Keyword(s):

Heat Transfer ◽

Heat Transfer Enhancement ◽

Lattice Structures ◽

Kagome Lattice ◽

Transfer Enhancement ◽

Kagomé Lattice ◽

Pin Fins

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Actuation of Kagome Lattice Structures

45th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics & Materials Conference ◽

10.2514/6.2004-1525 ◽

2004 ◽

Cited By ~ 3

Author(s):

Anthony Leung ◽

Digby Symons ◽

Simon Guest

Keyword(s):

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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Wave propagation in reconfigurable magneto-elastic kagome lattice structures

Journal of Applied Physics ◽

10.1063/1.4921358 ◽

2015 ◽

Vol 117 (19) ◽

pp. 194903 ◽

Cited By ~ 22

Author(s):

Marshall Schaeffer ◽

Massimo Ruzzene

Keyword(s):

Wave Propagation ◽

Lattice Structures ◽

Kagome Lattice ◽

Kagomé Lattice

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High-resolution grayscale patterning using extreme ultraviolet interference lithography

Microelectronic Engineering ◽

10.1016/j.mee.2017.01.007 ◽

2017 ◽

Vol 177 ◽

pp. 1-5 ◽

Cited By ~ 13

Author(s):

Roberto Fallica ◽

Robert Kirchner ◽

Helmut Schift ◽

Yasin Ekinci

Keyword(s):

High Resolution ◽

Extreme Ultraviolet ◽

Interference Lithography

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