Top-down fabrication of single crystal silicon nanowire using optical lithography

Nor F. Za’bah; Kelvin S. K. Kwa; Leon Bowen; Budhika Mendis; Anthony O’Neill

doi:10.1063/1.4737463

Top-down fabrication of single crystal silicon nanowire using optical lithography

Journal of Applied Physics ◽

10.1063/1.4737463 ◽

2012 ◽

Vol 112 (2) ◽

pp. 024309 ◽

Cited By ~ 15

Author(s):

Nor F. Za’bah ◽

Kelvin S. K. Kwa ◽

Leon Bowen ◽

Budhika Mendis ◽

Anthony O’Neill

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Optical Lithography ◽

Top Down ◽

Crystal Silicon

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Ga∕Au alloy catalyst for single crystal silicon-nanowire epitaxy

Applied Physics Letters ◽

10.1063/1.2431468 ◽

2007 ◽

Vol 90 (2) ◽

pp. 023109 ◽

Cited By ~ 20

Author(s):

A. Lugstein ◽

M. Steinmair ◽

Y. J. Hyun ◽

E. Bertagnolli ◽

P. Pongratz

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Alloy Catalyst

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A Molecular Dynamics and Quantum Mechanics Modeling of Single Crystal Silicon Nanowire Structures

Journal of Computational and Theoretical Nanoscience ◽

10.1166/jctn.2005.208 ◽

2005 ◽

Vol 2 (3) ◽

pp. 385-388 ◽

Cited By ~ 1

Author(s):

Kausala Mylvaganam ◽

Liangchi Zhang

Keyword(s):

Molecular Dynamics ◽

Quantum Mechanics ◽

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Crystal Silicon

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Fabrication of Single Crystal Silicon Nanowire Bridge

2010 First International Conference on Sensor Device Technologies and Applications ◽

10.1109/sensordevices.2010.53 ◽

2010 ◽

Author(s):

Kyung Tea Park ◽

Hyeon Cheol Kim ◽

Kukjin Chun

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Crystal Silicon

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Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device

Procedia Structural Integrity ◽

10.1016/j.prostr.2016.06.178 ◽

2016 ◽

Vol 2 ◽

pp. 1405-1412 ◽

Cited By ~ 6

Author(s):

Toshiyuki Tsuchiya ◽

Tetsuya Hemmi ◽

Jun-ya Suzuki ◽

Yoshikazu Hirai ◽

Osamu Tabata

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Tensile Fracture ◽

Testing Device ◽

Crystal Silicon

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Orientation-Controlled Growth of Single-Crystal Silicon-Nanowire Arrays

Advanced Materials ◽

10.1002/adma.200400474 ◽

2005 ◽

Vol 17 (1) ◽

pp. 56-61 ◽

Cited By ~ 91

Author(s):

S. Ge ◽

K. Jiang ◽

X. Lu ◽

Y. Chen ◽

R. Wang ◽

...

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Nanowire Arrays ◽

Controlled Growth ◽

Crystal Silicon ◽

Silicon Nanowire Arrays

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Synthesis of Ordered Single Crystal Silicon Nanowire Arrays

Advanced Materials ◽

10.1002/1521-4095(200108)13:16<1238::aid-adma1238>3.0.co;2-3 ◽

2001 ◽

Vol 13 (16) ◽

pp. 1238 ◽

Cited By ~ 72

Author(s):

X.-Y. Zhang ◽

L.-D. Zhang ◽

G.-W. Meng ◽

G.-H. Li ◽

N.-Y. Jin-Phillipp ◽

...

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Nanowire Arrays ◽

Crystal Silicon ◽

Silicon Nanowire Arrays

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Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300384 ◽

2007 ◽

Cited By ~ 1

Author(s):

X.L. Feng ◽

R.R. He ◽

P.D. Yang ◽

M.L. Roukes

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Energy Losses ◽

Quality Factors ◽

Crystal Silicon

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Direct measurement of shear piezoresistance coefficient on single crystal silicon nanowire by asymmetrical four-point bending test

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2014.6765712 ◽

2014 ◽

Author(s):

Taiki Kimura ◽

Naoki Saito ◽

Toshimitsu Takeshita ◽

Koji Sugano ◽

Yoshitada Isono

Keyword(s):

Single Crystal ◽

Direct Measurement ◽

Silicon Nanowire ◽

Single Crystal Silicon ◽

Bending Test ◽

Crystal Silicon ◽

Four Point Bending ◽

Four Point Bending Test ◽

Piezoresistance Coefficient

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Fabrication of Three-Dimensional MIS Nano-Capacitor Based on Nanoimprinted Single Crystal Silicon Nanowire Arrays

Micro and Nanosystems ◽

10.2174/1876402911204040333 ◽

2012 ◽

Vol 4 (4) ◽

pp. 333-338 ◽

Cited By ~ 3

Author(s):

Yujia Zhai ◽

Marylene Palard ◽

Leo Mathew ◽

Muhammad Mustafa Hussain ◽

C. Grant Willson ◽

...

Keyword(s):

Single Crystal ◽

Silicon Nanowire ◽

Three Dimensional ◽

Single Crystal Silicon ◽

Nanowire Arrays ◽

Crystal Silicon ◽

Silicon Nanowire Arrays

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Novel Top-Down Wafer-Scale Fabrication of Single Crystal Silicon Nanowires

Nano Letters ◽

10.1021/nl803181x ◽

2009 ◽

Vol 9 (3) ◽

pp. 1015-1022 ◽

Cited By ~ 74

Author(s):

Hien Duy Tong ◽

Songyue Chen ◽

Wilfred G. van der Wiel ◽

Edwin T. Carlen ◽

Albert van den Berg

Keyword(s):

Single Crystal ◽

Silicon Nanowires ◽

Single Crystal Silicon ◽

Top Down ◽

Crystal Silicon ◽

Wafer Scale

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