HfO2 dielectrics engineering using low power SF6 plasma on InP and In0.53Ga0.47As metal-oxide-semiconductor field-effect-transistors
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2012 ◽
Vol 12
(7)
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pp. 5313-5317
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2018 ◽
Vol 57
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pp. 06HD03
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2020 ◽
Vol 8
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Vol 46
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Vol 48
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pp. 04C100
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