Surface chemical reactions studied via ab initio‐derived molecular dynamics simulations: Fluorine etching of Si(100)
1993 ◽
Vol 98
(1)
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pp. 737-745
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2012 ◽
Vol 990
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pp. 152-158
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2014 ◽
Vol 16
(21)
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pp. 9760-9775
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2012 ◽
Vol 18
(18)
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pp. 5612-5619
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