A coupled cluster study of the classical barrier height of the F+H2→FH+H reaction

1991 ◽  
Vol 95 (10) ◽  
pp. 7426-7436 ◽  
Author(s):  
Gustavo E. Scuseria
2006 ◽  
Vol 125 (6) ◽  
pp. 064310 ◽  
Author(s):  
Mirjana Eckert-Maksić ◽  
Mario Vazdar ◽  
Mario Barbatti ◽  
Hans Lischka ◽  
Zvonimir B. Maksić

1998 ◽  
Vol 94 (1) ◽  
pp. 181-187 ◽  
Author(s):  
EPHRAIM ELIAV ◽  
UZI KALDOR ◽  
YASUYUKI ISHIKAWA

1998 ◽  
Vol 94 (1) ◽  
pp. 121-125 ◽  
Author(s):  
Gennady GUTSEV ◽  
RODNEY BARTLETT

2002 ◽  
Vol 716 ◽  
Author(s):  
K.L. Ng ◽  
N. Zhan ◽  
M.C. Poon ◽  
C.W. Kok ◽  
M. Chan ◽  
...  

AbstractHfO2 as a dielectric material in MOS capacitor by direct sputtering of Hf in an O2 ambient onto a Si substrate was studied. The results showed that the interface layer formed between HfO2 and the Si substrate was affected by the RTA time in the 500°C annealing temperature. Since the interface layer is mainly composed of hafnium silicate, and has high interface trap density, the effective barrier height is therefore lowered with increased RTA time. The change in the effective barrier height will affect the FN tunneling current and the operation of the MOS devices when it is applied for nonvolatile memory devices.


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