Open volume defects (measured by positron annihilation spectroscopy) in thin film hydrogen-silsesquioxane spin-on-glass; correlation with dielectric constant

1999 ◽  
Vol 86 (6) ◽  
pp. 3104-3109 ◽  
Author(s):  
Mihail P. Petkov ◽  
Marc H. Weber ◽  
Kelvin G. Lynn ◽  
Kenneth P. Rodbell ◽  
Stephan A. Cohen
APL Materials ◽  
2013 ◽  
Vol 1 (2) ◽  
pp. 022111 ◽  
Author(s):  
L. Chai ◽  
W. Al-Sawai ◽  
Y. Gao ◽  
A. J. Houtepen ◽  
P. E. Mijnarends ◽  
...  

2003 ◽  
Vol 788 ◽  
Author(s):  
Kenji Ito ◽  
Yoshinori Kobayashi ◽  
Ryoichi Suzuki ◽  
Toshiyuki Ohdaira ◽  
Runsheng Yu ◽  
...  

ABSTRACTWe a pplied ellipsometric porosimetry and variable-energy positron annihilation spectroscopy to the pore characterization of spin-on-glass silicon-oxide-backboned porous thin films with different relative dielectric constants between 2.3 and 3.2. It was found that the relative dielectric constant decreases linearly with increasing open porosity deduced by ellipsometric porosimetry. Comparison of the open porosity with the average pore size deduced by positron annihilation lifetime spectroscopy suggested that mesopores less contribute to open porosity and are not so effective in decreasing film relative dielectric constant in comparison with micropores.


2008 ◽  
Vol 17 (2) ◽  
pp. 160-164 ◽  
Author(s):  
C.Y. Lee ◽  
W.N. Kang ◽  
Y. Nagai ◽  
K. Inoue ◽  
M. Hasegawa

2005 ◽  
Vol 72 (16) ◽  
Author(s):  
S. Hautakangas ◽  
K. Saarinen ◽  
L. Liszkay ◽  
J. A. Freitas ◽  
R. L. Henry

2012 ◽  
Vol 331 ◽  
pp. 149-163 ◽  
Author(s):  
Reinhard Kögler ◽  
Wolfgang Anwand ◽  
Asta Richter ◽  
Maik Butterling ◽  
A. Mücklich ◽  
...  

Oxide-dispersion-strengthened (ODS) FeCrAl steel is a class with promising materials to be applied for future nuclear applications. However, radiation damage, especially the formation of vacancy clusters or gas-filled bubbles, may result in hardness increase and the loss of ductility. Positron annihilation spectroscopy (PAS) is demonstrated to be a very useful and non-destructive analysis method to detect and to determine open volume defects of sub-nm size in ODS alloy. Synchronized dual beam implantation of Fe and He ions is performed to simulate the radiation damage caused by (n, α) reactions and to avoid induced activation. For room temperature implantation, i.e. without significant point defect recombination, the differences in the defect formation are shown by comparison between irradiation of ODS alloy and pure Fe bulk. The open volume defects created in ODS alloy are vacancy clusters closely connected with dispersed Y oxide nanoparticles. Their profiles are in reasonable qualitative agreement with the hardness profiles, indicating a relationship between sub-nm vacancy clusters or He bubbles and the hardness of the material. In heat-treated ODS alloy, containing larger vacancy clusters, the radiation induced hardness increase is more distinctive than for as-received ODS alloy. For irradiation at a moderately enhanced temperature of 300°C open volume defects are drastically reduced. The few remaining defects are vacancy clusters of the same type as in as-received ODS alloy. Close to the surface the open volume defects completely disappear. These results are in agreement with the hardness measurements showing little hardness increase in this case. The suitability of ODS-based materials for nuclear applications was verified.


2014 ◽  
Vol 64 (11) ◽  
pp. 241-253 ◽  
Author(s):  
J. Slotte ◽  
F. Tuomisto ◽  
J. Kujala ◽  
A. M. Holm ◽  
N. Segercrantz ◽  
...  

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