Open volume defects (measured by positron annihilation spectroscopy) in thin film hydrogen-silsesquioxane spin-on-glass; correlation with dielectric constant
2008 ◽
Vol 17
(2)
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pp. 160-164
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Keyword(s):
Keyword(s):
2013 ◽
Vol 22
(5)
◽
pp. 250-256
◽
2012 ◽
Vol 331
◽
pp. 149-163
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