Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge
Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 7B)
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pp. 4404-4415
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1995 ◽
Vol 50
(4-7)
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pp. 617-638
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2017 ◽
Vol 10
(1)
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pp. 381-388
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2018 ◽
Vol 442
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pp. 412-416
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