scholarly journals Analysis of the reverse leakage current in AlGaN/GaN Schottky barrier diodes treated with fluorine plasma

2012 ◽  
Vol 100 (13) ◽  
pp. 132104 ◽  
Author(s):  
Woo Jin Ha ◽  
Sameer Chhajed ◽  
Seung Jae Oh ◽  
Sunyong Hwang ◽  
Jong Kyu Kim ◽  
...  
2020 ◽  
Vol 117 (2) ◽  
pp. 022106 ◽  
Author(s):  
Sayleap Sdoeung ◽  
Kohei Sasaki ◽  
Katsumi Kawasaki ◽  
Jun Hirabayashi ◽  
Akito Kuramata ◽  
...  

2016 ◽  
Vol 9 (3) ◽  
pp. 031001 ◽  
Author(s):  
Xing Lu ◽  
Chao Liu ◽  
Huaxing Jiang ◽  
Xinbo Zou ◽  
Anping Zhang ◽  
...  

2020 ◽  
Vol 116 (19) ◽  
pp. 192101 ◽  
Author(s):  
Wenshen Li ◽  
Devansh Saraswat ◽  
Yaoyao Long ◽  
Kazuki Nomoto ◽  
Debdeep Jena ◽  
...  

2021 ◽  
Vol 118 (17) ◽  
pp. 172106
Author(s):  
Sayleap Sdoeung ◽  
Kohei Sasaki ◽  
Satoshi Masuya ◽  
Katsumi Kawasaki ◽  
Jun Hirabayashi ◽  
...  

2015 ◽  
Vol 821-823 ◽  
pp. 177-180 ◽  
Author(s):  
Chiaki Kudou ◽  
Hirokuni Asamizu ◽  
Kentaro Tamura ◽  
Johji Nishio ◽  
Keiko Masumoto ◽  
...  

Homoepitaxial layers with different growth pit density were grown on 4H-SiC Si-face substrates by changing C/Si ratio, and the influence of the growth pit density on Schottky barrier diodes and metal-oxide-semiconductor capacitors were investigated. Even though there were many growth pits on the epi-layer, growth pit density did not affect the leakage current of Schottky barrier diodes and lifetime of constant current time dependent dielectric breakdown. By analyzing the growth pit shape, the aspect ratio of the growth pit was considered to be the key factor to the leakage current of the Schottky barrier diodes and the lifetime of metal-oxide-semiconductor capacitors.


2021 ◽  
Vol 15 (1) ◽  
pp. 016501
Author(s):  
Fumio Otsuka ◽  
Hironobu Miyamoto ◽  
Akio Takatsuka ◽  
Shinji Kunori ◽  
Kohei Sasaki ◽  
...  

Abstract We fabricated high forward and low leakage current trench MOS-type Schottky barrier diodes (MOSSBDs) in combination with a field plate on a 12 μm thick epitaxial layer grown by halide vapor phase epitaxy on β-Ga2O3 (001) substrate. The MOSSBDs, measuring 1.7 × 1.7 mm2, exhibited a forward current of 2 A (70 A cm−2) at 2 V forward voltage and a leakage current of 5.7 × 10–10 A at −1.2 kV reverse voltage (on/off current ratio of > 109) with an ideality factor of 1.05 and wafer-level specific on-resistance of 17.1 mΩ · cm2.


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