Beta dependence of electron heating in decaying whistler turbulence: Particle-in-cell simulations

S. Saito; S. Peter Gary

doi:10.1063/1.3676155

Beta dependence of electron heating in decaying whistler turbulence: Particle-in-cell simulations

Physics of Plasmas ◽

10.1063/1.3676155 ◽

2012 ◽

Vol 19 (1) ◽

pp. 012312 ◽

Cited By ~ 18

Author(s):

S. Saito ◽

S. Peter Gary

Keyword(s):

Electron Heating ◽

Particle In Cell

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Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas

Open Chemistry ◽

10.1515/chem-2015-0044 ◽

2014 ◽

Vol 13 (1) ◽

Cited By ~ 15

Author(s):

Aranka Derzsi ◽

Edmund Schüngel ◽

Zoltán Donkó ◽

Julian Schulze

Keyword(s):

Control Parameter ◽

Second Harmonic ◽

Low Frequency ◽

Dual Frequency ◽

Electron Heating ◽

Particle In Cell ◽

Sheath Edge ◽

Separate Control ◽

Frequency Coupling ◽

Coupling Mechanisms

AbstractTwo types of capacitive dual-frequency discharges, used in plasma processing applications to achieve the separate control of the ion flux, Гi, and the mean ion energy, <Ei>, at the electrodes, operated in CF4, are investigated by particle-in-cell simulations: (i) In classical dual-frequency discharges, driven by significantly different frequencies (1.937 MHz + 27.12 MHz), <Ei> and Гi are controlled by the voltage amplitudes of the low-frequency and high-frequeny components, ΦLF and ΦHF, respectively. (ii) In electrically asymmetric (EA) discharges, operated at a fundamental frequency and its second harmonic (13.56 MHz + 27.12 MHz), ΦLF and ΦHF control Гi, whereas the phase shift between the driving frequencies, θ, is varied to adjust <Ei>.We focus on the effect of changing the control parameter for <Ei> on the electron heating and ionization dynamics and on Гi. We find that in both types of dual-frequency strongly electronegative discharges, changing the control parameter results in a complex effect on the electron heating and ionization dynamics: in classical dual-frequency discharges, besides the frequency coupling affecting the sheath expansion heating, additional frequency coupling mechanisms influence the electron heating in the plasma bulk and at the collapsing sheath edge; in EA dual-frequency discharges the electron heating in the bulk results in asymmetric ionization dynamics for values of θ around 45°, i.e., in the case of a symmetric applied

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