Development of a new dynamic gas flow-control system in the pressure range of 1 Pa–133 Pa

2011 ◽  
Vol 82 (12) ◽  
pp. 125112
Author(s):  
S. S. Hong ◽  
Wakil Khan ◽  
J. W. Chung
1988 ◽  
Vol 21 (5) ◽  
pp. 505-507
Author(s):  
E W Randall ◽  
M Kojima ◽  
C T O'Connor ◽  
K Herzog

2001 ◽  
Author(s):  
T. Carlsson ◽  
A. Sokolov ◽  
A. Idebrant ◽  
M. Jirstrand

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