Molecular dynamics simulations of low-energy (25–200 eV) argon ion interactions with silicon surfaces: Sputter yields and product formation pathways

1998 ◽  
Vol 83 (8) ◽  
pp. 4055-4063 ◽  
Author(s):  
Nawoyuki A. Kubota ◽  
Demetre J. Economou ◽  
Steven J. Plimpton
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Product Formation ◽  
Low Energy ◽  
Silicon Surfaces ◽  
Ion Interactions ◽  
Dynamics Simulations ◽  
Argon Ion

scholarly journals Growth mechanism of hydrogenated carbon films: molecular dynamics simulations of the effects of low energy CH radical

2012 ◽  
Vol 61 (3) ◽  
pp. 030701
Author(s):  
Song Qing ◽  
Ji Li ◽  
Quan Wei-Long ◽  
Zhang Lei ◽  
Tian Miao ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Growth Mechanism ◽  
Carbon Films ◽  
Low Energy ◽  
Dynamics Simulations ◽  
Ch Radical
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