A close-coupling multi-antenna type radio frequency driven ion source
2012 ◽
Vol 83
(2)
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pp. 02B106
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Keyword(s):
1996 ◽
Vol 67
(3)
◽
pp. 1302-1307
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Keyword(s):
2016 ◽
Vol 18
(10)
◽
pp. 105006
◽
Keyword(s):