Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping

1998 ◽  
Vol 83 (1) ◽  
pp. 126-131 ◽  
Author(s):  
A. A. Darhuber ◽  
G. Bauer ◽  
P. D. Wang ◽  
C. M. Sotomayor Torres
Keyword(s):  
High Resolution ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Shear Strains

Experimental and Theoretical Study of the Triple-Crystal High-Resolution X-Ray Diffraction Scheme in Reciprocal Space Mapping Technique

2019 ◽  
Vol 64 (4) ◽  
pp. 545-552 ◽  
Author(s):  
A. Yu. Seregin ◽  
P. A. Prosekov ◽  
F. N. Chukhovsky ◽  
Yu. A. Volkovsky ◽  
A. E. Blagov ◽  
...  
Keyword(s):  
High Resolution ◽  
Theoretical Study ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Mapping Technique ◽  
X Ray Diffraction ◽  
Reciprocal Space Mapping ◽  
X Ray

scholarly journals High Resolution X-ray Reciprocal Space Mapping

1996 ◽  
Vol 89 (2) ◽  
pp. 115-127 ◽  
Author(s):  
G. Bauer ◽  
J.H. Li ◽  
V. Holy
Keyword(s):  
High Resolution ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
X Ray

High Resolution X-Ray Reciprocal Space Mapping of Wavy Layers

1997 ◽  
Vol 472 ◽  
Author(s):  
P. Kidd ◽  
P. F. Fewster
Keyword(s):  
High Resolution ◽  
Block Size ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Interface Roughness ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Wavy Interface ◽  
Thickness Variations ◽  
Inp Substrates

ABSTRACTWe apply the technique of High Resolution X-ray Reciprocal Space Mapping (HRRSM) to the study of wavy layers in InGaAs multilayer thin films on InP substrates. By accurately measuring the positions of the layer Bragg peaks in reciprocal space we obtain measurements of the compositions and residual coherency strains in the layers. We discuss the contributions to the diffuse scatter around the Bragg peaks from factors such as lattice tilts and interface roughness. By modelling the shapes of the diffraction profiles we obtain measurements of mosaic block size both perpendicular and parallel to the multilayer/substrate interface. We conclude that the wavy interface morphology arises predominantly from layer thickness variations rather than lattice tilts.

Preparations and Characterizations of Epitaxial SrBi2Ta2O9 Thin Films

2000 ◽  
Vol 655 ◽  
Author(s):  
Keisuke Saito ◽  
Masatoshi Mitsuya ◽  
Toshimasa Suzuki ◽  
Yuji Nishi ◽  
Masayuki Fujimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
High Resolution ◽  
Pole Figure ◽  
Lattice Parameter ◽  
Space Mapping ◽  
Reciprocal Space ◽  
X Ray Diffraction ◽  
Reciprocal Space Mapping ◽  
X Ray

AbstractEpitaxial (001)-, (116)- and pseudo (103)-oriented Sr0.35Bi2.2Ta2O9 (SBT (0.35/2.2/2.0)) films were successfully grown on (001), (110) and (111) SrTiO3 substrates, respectively. High-resolution X-ray diffraction reciprocal space mapping (HRXRD-RSM) measurements and pole figure measurements clearly indicated that the (116)-oriented SBT (0.35/2.2/2.0) film consisted of two growth domains those c-axis are separated 180° apart in in-plane and pseudo (103)-oriented SBT film consisted of three growth domains those c-axis are separated 120° apart in in-plane. Moreover, lattice parameter measurements indicated that SBT films grew in fully relaxed state.

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