In-situ Synchrotron Radiation X-ray Scattering Study On The Initial Structure Of Atomic Layer Deposition

2011 ◽  
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Dong Ryeol Lee ◽  
Hyun Hwi Lee ◽  
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Hyungjun Kim ◽  
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Michael R. Hudak ◽  
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Edgar Gutiérrez-Fernández ◽  
Mari-Cruz García-Gutiérrez ◽  
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2014 ◽  
Vol 64 ◽  
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