The second generation Singapore high resolution proton beam writing facility
2012 ◽
Vol 83
(2)
◽
pp. 02B902
◽
2008 ◽
Vol 41
(19)
◽
pp. 192002
◽
2011 ◽
Vol 284-286
◽
pp. 1584-1587
2005 ◽
Vol 231
(1-4)
◽
pp. 372-377
◽
2014 ◽
Vol 32
(6)
◽
pp. 06F506
◽
2013 ◽
Vol 31
(6)
◽
pp. 06F403
◽
2019 ◽
Vol 30
(7)
◽
pp. 1433-1443
◽
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