High-resolution X-ray diffraction measurements were carried out on ZnO/Si devices under surface acoustic wave excitation and revealed some very clear satellite diffraction peaks that are obtained from the sinusoidal modulation of the near-surface region. This experiment shows that the propagation of a Rayleigh surface acoustic wave in a perfect crystal acts as a dynamical diffraction grating. The variation of the acoustic velocity has been followed across the crystal surface from the acoustic source region (beneath the ZnO film) to the far field region (not covered by the ZnO film).
Equations describing the coherent and diffuse scattering in a crystal modulated by a surface acoustic wave (SAW) are derived using the dynamical X-ray diffraction theory. The effect of depth attenuation of the Rayleigh surface wave amplitude on the crystal rocking curve profiles is investigated. Results of the numerical simulation of the dynamical diffraction in a mosaic crystal modulated by a SAW, taking into account a block size distribution, are presented. It is shown that the diffuse scattering is distributed in the reciprocal space not only in the vicinity of the main diffraction peak but also about the satellite diffraction peaks, and this distribution depends on the size fluctuations of the crystal defects. Theoretical reciprocal space maps and rocking curves are compared with the corresponding experimental results.
It is well known that the process of heating and then cooling dissimilar materials introduces considerable stress at and near the interface. In this article, first, the surface wave velocity distributions obtained with the Vz curve technique were found to compare well with residual stress distribution measured by the finely collimated X-ray diffraction technique. Second, a delamination was introduced at the interface. The Vz curve technique was then used again to measure the surface acoustic wave velocity along the interface. The defective specimens showed significantly different patterns of surface acoustic wave velocities. Thus, this study presents useful guidelines in discriminating between sound and defective ceramic/metal joints by scanning acoustic microscopy.
Crystal relief investigation under the X-ray diffraction on surface acoustic wave in Bragg-Laue grazing geometry