Influence of the interface on growth rates in AlN/GaN short period superlattices via metal organic vapor phase epitaxy

2011 ◽  
Vol 99 (20) ◽  
pp. 201903 ◽  
Author(s):  
L. E. Rodak ◽  
D. Korakakis
Keyword(s):  
Vapor Phase ◽  
Growth Rates ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Short Period ◽  
Short Period Superlattices ◽  
Metal Organic

Bandgap behavior of InGaN/GaN short period superlattices grown by metal-organic vapor phase epitaxy

2017 ◽  
Vol 254 (8) ◽  
pp. 1600710 ◽  
Author(s):  
G. Staszczak ◽  
I. Gorczyca ◽  
E. Grzanka ◽  
J. Smalc-Koziorowska ◽  
G. Targowski ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Short Period ◽  
Short Period Superlattices ◽  
Metal Organic

High growth rates of AlN and AlGaN on 8″ silicon wafer using metal-organic vapor phase epitaxy reactor

2013 ◽  
Vol 10 (11) ◽  
pp. 1353-1356 ◽  
Author(s):  
Akinori Ubukata ◽  
Yoshiki Yano ◽  
Yuya Yamaoka ◽  
Yuichiro Kitamura ◽  
Toshiya Tabuchi ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Vapor Phase ◽  
Growth Rates ◽  
High Growth ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

AlN/GaN Distributed Bragg Reflectors Grown via Metal Organic Vapor Phase Epitaxy using GaN Insertion Layers

2012 ◽  
Vol 1396 ◽  
Author(s):  
L. E. Rodak ◽  
J. Peacock ◽  
J. Justice ◽  
D. Korakakis
Keyword(s):  
Refractive Index ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Material System ◽  
Bragg Reflectors ◽  
Distributed Bragg Reflectors ◽  
Organic Vapor ◽  
High Reflectivity ◽  
Short Period ◽  
Metal Organic

ABSTRACTDistributed Bragg Reflectors (DBRs) are an important component of various optoelectronic devices for ultra violet and visible wavelengths. In the III-Nitride material system, Aluminum Nitride (AlN) and Gallium Nitride (GaN) offer a large contrast in refractive index and are therefore well suited for fabricating DBRs with high reflectivity and wide bandwidths using relatively few periods. However, the large lattice and thermal mismatch leads to cracking in these heterostructures. In this work short period superlattice layers have been used to fabricate high reflectivity (> 94%) nitride based DBRs via Metal Organic Vapor Phase Epitaxy. Short period AlN/GaN superlattices containing three to four monolayers of GaN have been employed as the low refractive index layer in DBRs to minimize cracking. Using this technique, crack-free DBRs reflecting from 440-475 nm with up to 25 periods have been fabricated. The technique has been proven to be versatile and resulted in large area yield DBRs grown on a variety of different sapphire substrates.

Density of InAs∕InP(001) quantum dots grown by metal-organic vapor phase epitaxy: Independent effects of InAs and cap-layer growth rates

2007 ◽  
Vol 91 (10) ◽  
pp. 102107 ◽  
Author(s):  
A. Michon ◽  
G. Patriarche ◽  
G. Beaudoin ◽  
G. Saint-Girons ◽  
N. Gogneau ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Vapor Phase ◽  
Growth Rates ◽  
Layer Growth ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Cap Layer ◽  
Metal Organic ◽  
Independent Effects

Kinetic Analysis of InN Selective Area Metal–Organic Vapor Phase Epitaxy

2008 ◽  
Vol 1 ◽  
pp. 071102 ◽  
Author(s):  
Tomonari Shioda ◽  
Masakazu Sugiyama ◽  
Yukihiro Shimogaki ◽  
Yoshiaki Nakano
Keyword(s):  
Kinetic Analysis ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Selective Area ◽  
Metal Organic

Deep Electronic Levels of AlxGa1-xN with a Wide Range of Al Composition Grown by Metal–Organic Vapor Phase Epitaxy

2010 ◽  
Vol 49 (10) ◽  
pp. 101001 ◽  
Author(s):  
Kimihito Ooyama ◽  
Katsuya Sugawara ◽  
Shinya Okuzaki ◽  
Hiroyuki Taketomi ◽  
Hideto Miyake ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Wide Range ◽  
Metal Organic

A two-step metal organic vapor phase epitaxy growth method for high-quality ZnO on GaN/Al2O3 (0001)

2004 ◽  
Vol 267 (1-2) ◽  
pp. 140-144 ◽  
Author(s):  
A. Dadgar ◽  
N. Oleynik ◽  
D. Forster ◽  
S. Deiter ◽  
H. Witek ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
High Quality ◽  
Organic Vapor ◽  
Growth Method ◽  
Metal Organic
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