A study of ion velocity distribution functions in processing plasmas produced by electron cyclotron resonance discharges
1999 ◽
Vol 38
(Part 1, No. 7B)
◽
pp. 4393-4396
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2014 ◽
Vol 24
(1)
◽
pp. 015018
◽
1999 ◽
pp. 543-544