A structural and topographical study of low-pressure chemical-vapor-deposited polysilicon by scanning probe microscopy

1997 ◽  
Vol 81 (10) ◽  
pp. 6749-6753 ◽  
Author(s):  
A. Pleschinger ◽  
J. Lutz ◽  
F. Kuchar ◽  
H. Noll ◽  
M. Pippan
Keyword(s):  
Scanning Probe Microscopy ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Chemical Vapor Deposited ◽  
Pressure Chemical

Scanning probe microscopy investigations of the electrical properties of chemical vapor deposited graphene grown on a 6H-SiC substrate

Micron ◽  
2015 ◽  
Vol 68 ◽  
pp. 17-22 ◽  
Author(s):  
Krzysztof Gajewski ◽  
Daniel Kopiec ◽  
Magdalena Moczała ◽  
Adam Piotrowicz ◽  
Michał Zielony ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Scanning Probe Microscopy ◽  
Chemical Vapor ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Chemical Vapor Deposited
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