Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films

W. K. Choi; L. J. Han; F. L. Loo

doi:10.1063/1.363845

Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films

Journal of Applied Physics ◽

10.1063/1.363845 ◽

1997 ◽

Vol 81 (1) ◽

pp. 276-280 ◽

Cited By ~ 20

Author(s):

W. K. Choi ◽

L. J. Han ◽

F. L. Loo

Keyword(s):

Silicon Carbide ◽

Radio Frequency ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Electrical Characterization ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide

Journal of Applied Physics ◽

10.1063/1.1367398 ◽

2001 ◽

Vol 89 (11) ◽

pp. 6153-6158 ◽

Cited By ~ 15

Author(s):

J. Cui ◽

Rusli ◽

S. F. Yoon ◽

E. J. Teo ◽

M. B. Yu ◽

...

Keyword(s):

Silicon Carbide ◽

Radio Frequency ◽

Amorphous Silicon ◽

Structural Properties ◽

Bias Voltage ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Changes of chemical structure of hydrogenated amorphous silicon carbide films with the application of radio-frequency bias voltages during chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2016.03.006 ◽

2016 ◽

Vol 66 ◽

pp. 1-9 ◽

Cited By ~ 3

Author(s):

Haruhiko Ito ◽

Takeshi Ogaki ◽

Motoki Kumakura ◽

Shunsuke Saeki ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Radio Frequency ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Structure ◽

Hydrogenated Amorphous Silicon ◽

Chemical Vapor ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Spectral ellipsometric and compositional characterization of hydrogenated amorphous silicon carbide thin films

Diamond and Related Materials ◽

10.1016/0925-9635(94)05253-0 ◽

1995 ◽

Vol 4 (5-6) ◽

pp. 702-705 ◽

Cited By ~ 10

Author(s):

E. Pascual ◽

J.L. Andújar ◽

J.L. Fernández ◽

E. Bertran

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous ◽

Compositional Characterization

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Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films

Journal of Applied Physics ◽

10.1063/1.360377 ◽

1995 ◽

Vol 78 (12) ◽

pp. 7289-7294 ◽

Cited By ~ 34

Author(s):

W. K. Choi ◽

F. L. Loo ◽

C. H. Ling ◽

F. C. Loh ◽

K. L. Tan

Keyword(s):

Silicon Carbide ◽

Radio Frequency ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Electrical Studies ◽

Hydrogenated Amorphous

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Characterization of the silicon network disorder in hydrogenated amorphous silicon carbide alloys with low carbon concentrations

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(95)00459-9 ◽

1996 ◽

Vol 194 (1-2) ◽

pp. 78-84 ◽

Cited By ~ 24

Author(s):

G. Morell ◽

R.S. Katiyar ◽

S.Z. Weisz ◽

I. Balberg

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Low Carbon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous ◽

Carbon Concentrations

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The influence of radio frequency power on the characteristics of carbon-rich hydrogenated amorphous silicon carbide films

Journal of Physics Conference Series ◽

10.1088/1742-6596/276/1/012156 ◽

2011 ◽

Vol 276 ◽

pp. 012156

Author(s):

Juncao Bian ◽

Zhe Li ◽

Haiyan He ◽

Xiwen Zhang ◽

Jiang Lin ◽

...

Keyword(s):

Silicon Carbide ◽

Radio Frequency ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Radio Frequency Power ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous ◽

Frequency Power

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Hydrogenated Amorphous Silicon Carbide Alternating-Current Thin-Film Light-Emitting Diodes

Journal of The Electrochemical Society ◽

10.1149/1.2742806 ◽

2007 ◽

Vol 154 (8) ◽

pp. H687

Author(s):

Rong-Hwei Yeh ◽

Ginn-Horng Chen ◽

Shih-Yung Lo ◽

Jyh-Wong Hong

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Light Emitting Diodes ◽

Hydrogenated Amorphous Silicon ◽

Alternating Current ◽

Amorphous Silicon Carbide ◽

Light Emitting ◽

Hydrogenated Amorphous

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Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties

Journal of Non-Crystalline Solids ◽

10.1016/0022-3093(83)90643-9 ◽

1983 ◽

Vol 59-60 ◽

pp. 553-556 ◽

Cited By ~ 19

Author(s):

S. Nitta ◽

A. Hatano ◽

M. Yamada ◽

M. Watanabe ◽

M. Kawai

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrocarbon Gas ◽

Hydrogenated Amorphous

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The effect of relatively low hydrogen dilution on the properties of carbon-rich hydrogenated amorphous silicon carbide films

Journal of Physics Conference Series ◽

10.1088/1742-6596/276/1/012173 ◽

2011 ◽

Vol 276 ◽

pp. 012173 ◽

Cited By ~ 4

Author(s):

Zhe Li ◽

Juncao Bian ◽

Haiyan He ◽

Xiwen Zhang ◽

Gaorong Han

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogen Dilution ◽

Hydrogenated Amorphous

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