ABSTRACTWe have grown superlattices based on the Clb Heusler alloys PtMnSb, CuMnSb and NiMnSb between 200–500°C on A12O3 (0001). X-ray diffraction (XRD) indicates (111) oriented ordered structures for growth at 300°C. Higher deposition temperature leads to interdiffusion, loss of the multilayer structure and appearance of extra phases. Growth at 200°C slightly reduces the intermixing but also reduces the quality of the crystal structure. For PtMnSb/CuMnSb, we found an enhancement of the saturation magnetization compared to equivalent PtMnSb single layer films and a CuMnSb spacer thickness dependence of the squareness of the M(H) 100ps suggestive of interlayer coupling. Short periodicity NiMnSb/PtMnSb superlattices show an in-plane magnetic easy axis, but correction for shape anisotropy indicates a tendency for perpendicular anisotropy.