The thermal conductivity of polycrystalline diamond films: Effects of isotope content

1996 ◽  
Vol 79 (11) ◽  
pp. 8336-8340 ◽  
Author(s):  
Kalayu Belay ◽  
Zongyin Etzel ◽  
David G. Onn ◽  
T. R. Anthony
1998 ◽  
Vol 40 (7) ◽  
pp. 1112-1116 ◽  
Author(s):  
A. N. Obraztsov ◽  
I. Yu. Pavlovskii ◽  
H. Okushi ◽  
H. Watanabe

1999 ◽  
Vol 44 (4) ◽  
pp. 438-442 ◽  
Author(s):  
A. N. Obraztsov ◽  
I. Yu. Pavlovskii ◽  
V. G. Ral’chenko ◽  
H. Okushi ◽  
H. Watanabe

1989 ◽  
Vol 162 ◽  
Author(s):  
R. W. Pryor ◽  
P. K. Kuo ◽  
L. Wei ◽  
R. L. Thomas ◽  
P. L. Talley

ABSTRACTIn this paper, the thermal wave technique and microfocus Raman spectroscopy are used to measure the relative quality of thin diamond films deposited on silicon. The thermal wave technique uses a modulated heating laser beam, normal to the diamond film surface, to initiate a thermal wave which propagates into the film, the substrate, and the overlying gas(ses). The accompanying modulated gas density is then interrogated by a second (probe) laser beam. The probe beam is deflected by the corresponding periodic changes in the gradient of the refractive index of the gas. The measured probe beam deflection versus offset position is fitted, using a theoretical solution of the three-dimensional thermal diffusion equation for the gas/film/substrate system. The physically important fitting parameter is the thermal diffusivity of the diamond film. Thermal conductivities derived from our diffusivity measurements using this method compare well to previous measurements on similarly prepared films by other methods. Our measured values for the thermal conductivity of the highest-quality polycrystalline diamond films are of the order of 12 W/cm-K. Our measured values of thermal conductivity for diamond films range between this value and the thermal conductivity of graphite. We have also made measurements on bulk diamond using the thermal wave technique, and we obtain a thermal conductivity of 21 W/cm-K, in excellent agreement with values found in the literature. A multi-scan, microfocus ratio of “graphitic” material to diamond material for a relative assessment of film quality.


1991 ◽  
Vol 69 (12) ◽  
pp. 8122-8125 ◽  
Author(s):  
T. R. Anthony ◽  
J. L. Fleischer ◽  
J. R. Olson ◽  
David G. Cahill

Author(s):  
D.P. Malta ◽  
S.A. Willard ◽  
R.A. Rudder ◽  
G.C. Hudson ◽  
J.B. Posthill ◽  
...  

Semiconducting diamond films have the potential for use as a material in which to build active electronic devices capable of operating at high temperatures or in high radiation environments. A major goal of current device-related diamond research is to achieve a high quality epitaxial film on an inexpensive, readily available, non-native substrate. One step in the process of achieving this goal is understanding the nucleation and growth processes of diamond films on diamond substrates. Electron microscopy has already proven invaluable for assessing polycrystalline diamond films grown on nonnative surfaces.The quality of the grown diamond film depends on several factors, one of which is the quality of the diamond substrate. Substrates commercially available today have often been found to have scratched surfaces resulting from the polishing process (Fig. 1a). Electron beam-induced current (EBIC) imaging shows that electrically active sub-surface defects can be present to a large degree (Fig. 1c). Growth of homoepitaxial diamond films by rf plasma-enhanced chemical vapor deposition (PECVD) has been found to planarize the scratched substrate surface (Fig. 1b).


2021 ◽  
Vol 113 ◽  
pp. 108279
Author(s):  
Leo Saturday ◽  
Leslie Wilson ◽  
Scott Retterer ◽  
Nicholas J. Evans ◽  
Dayrl Briggs ◽  
...  

CIRP Annals ◽  
1990 ◽  
Vol 39 (1) ◽  
pp. 585-588 ◽  
Author(s):  
R. Komanduri ◽  
L.L. Fehrenbacher ◽  
L.M. Hanssen ◽  
A. Morrish ◽  
K.A. Snail ◽  
...  

1994 ◽  
Vol 3 (4-6) ◽  
pp. 663-671 ◽  
Author(s):  
J. Ullmann ◽  
A. Weber ◽  
B. Mainz ◽  
J. Stiegler ◽  
T. Schuhrke

2007 ◽  
Vol 24-25 ◽  
pp. 377-382
Author(s):  
Rong Fa Chen ◽  
Dun Wen Zuo ◽  
Yu Li Sun ◽  
Wen Zhuang Lu ◽  
D.S. Li ◽  
...  

Although research on various diamond polishing techniques has been carried for years, some issues still need to be examined in order to facilitate application on large areas in a cost-efficient manner. A compositive technique for machining efficiently thick diamond films prepared by DC plasma arc jet is reported in the present paper. A two-stage polishing was applied on thick polycrystalline diamond films, by employing first electro-discharge machining (EDM) for rough polishing and subsequently mechanical polishing for finishing operations. Experimental results obtained clearly indicate the applicability of the proposed two-stage technique for fabricating transparent diamond films that can be used for the production of X-ray windows. Appropriate etching with EDM is an effective pretreatment method for enhancing the efficiency of rough polishing process in mechanical polishing of thick diamond film. The machined surfaces of diamond films are studied by Scanning Electron Microscope (SEM) and Raman Scattering Spectroscopy (Raman).


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