Evidence for inelastic processes for N+3and N+4from ion energy distributions in He/N2radio frequency glow discharges

1996 ◽  
Vol 79 (1) ◽  
pp. 93-98 ◽  
Author(s):  
Helen H. Hwang ◽  
James K. Olthoff ◽  
Richard J. Van Brunt ◽  
Svetlana B. Radovanov ◽  
Mark J. Kushner
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Glow Discharges ◽  
Ion Energy Distributions ◽  
Inelastic Processes

Ion energy distributions in rf sheaths; review, analysis and simulation

1999 ◽  
Vol 8 (3) ◽  
pp. R45-R64 ◽  
Author(s):  
E Kawamura ◽  
V Vahedi ◽  
M A Lieberman ◽  
C K Birdsall
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Review Analysis ◽  
Ion Energy Distributions

scholarly journals Ponderomotive force and ion energy distributions in an rf sheath

1992 ◽  
Vol 68 (1) ◽  
pp. 44-47 ◽  
Author(s):  
S. Hamaguchi ◽  
R. T. Farouki ◽  
M. Dalvie
Keyword(s):  
Ponderomotive Force ◽  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions
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