Correlation of residual impurity concentration and acceptor electron paramagnetic resonance linewidth in isotopically engineered Si

2011 ◽  
Vol 99 (3) ◽  
pp. 032101 ◽  
Author(s):  
A. R. Stegner ◽  
H. Tezuka ◽  
H. Riemann ◽  
N. V. Abrosimov ◽  
P. Becker ◽  
...  
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