Image sensor as a three-channel spectrometer with application to in situ monitoring of wet etching

2011 ◽  
Vol 82 (7) ◽  
pp. 075103
Author(s):  
John Gerling ◽  
Nathan W. Cheung
Keyword(s):  
Image Sensor ◽  
Wet Etching ◽  
In Situ Monitoring

Study on In Situ Etching Rate Monitoring in Numerically Controlled Local Wet Etching

2012 ◽  
Vol 523-524 ◽  
pp. 34-39
Author(s):  
Naoki Shimozono ◽  
Mikinori Nagano ◽  
Takaaki Tabata ◽  
Kazuya Yamamura
Keyword(s):  
Raman Spectroscopy ◽  
Removal Rate ◽  
Etching Rate ◽  
Conductivity Measurement ◽  
Surface Damage ◽  
Wet Etching ◽  
In Situ Monitoring ◽  
Promising Technique ◽  
Aspherical Lens

Numerically controlled local wet etching (NC-LWE) is very promising technique for deterministic figuring of ultraprecision optical devices, such as aspherical lens, photo mask substrate and X-ray or neutron focusing mirror. NC-LWE technique is non-contact removal process using chemical reaction between etchant and surface of workpiece, so this technique enables us to figure the objective shape without introduction both substrate deformation and sub-surface damage. It is essential to measure temperature and concentration of the etchant to maintain the material removal rate constant over a processing time, since the etching rate of NC-LWE strongly depends on these parameters. Hydrofluoric (HF) acid solution is used as an etchant for synthesized quartz glass. We aim to develop an in situ monitoring system of etchant concentration using Raman spectroscopy and electric conductivity measurement. Raman spectroscopy measurement result indicates that there is a good linear relationship between HF concentration and intensity ratio of two specific Raman bands.

scholarly journals SoilCam: A Fully Automated Minirhizotron using Multispectral Imaging for Root Activity Monitoring

Sensors ◽  
2020 ◽  
Vol 20 (3) ◽  
pp. 787
Author(s):  
Gazi Rahman ◽  
Hanif Sohag ◽  
Rakibul Chowdhury ◽  
Khan A. Wahid ◽  
Anh Dinh ◽  
...  
Keyword(s):  
White Light ◽  
Multispectral Imaging ◽  
Imaging System ◽  
Image Sensor ◽  
Motion Blur ◽  
Image Resolution ◽  
In Situ Monitoring ◽  
Geometric Distortion ◽  
Entire Area

A minirhizotron is an in situ root imaging system that captures components of root system architecture dynamics over time. Commercial minirhizotrons are expensive, limited to white-light imaging, and often need human intervention. The implementation of a minirhizotron needs to be low cost, automated, and customizable to be effective and widely adopted. We present a newly designed root imaging system called SoilCam that addresses the above mentioned limitations. The imaging system is multi-modal, i.e., it supports both conventional white-light and multispectral imaging, with fully automated operations for long-term in-situ monitoring using wireless control and access. The system is capable of taking 360° images covering the entire area surrounding the tube. The image sensor can be customized depending on the spectral imaging requirements. The maximum achievable image quality of the system is 8 MP (Mega Pixel)/picture, which is equivalent to a 2500 DPI (dots per inch) image resolution. The length of time in the field can be extended with a rechargeable battery and solar panel connectivity. Offline image-processing software, with several image enhancement algorithms to eliminate motion blur and geometric distortion and to reconstruct the 360° panoramic view, is also presented. The system is tested in the field by imaging canola roots to show the performance advantages over commercial systems.

3302 In-situ monitoring and control of Si wet etching process

2008 ◽  
Vol 2008 (0) ◽  
pp. 79-80
Author(s):  
Atsushi OTANI ◽  
Atsushi SAKAIDA ◽  
Yoshitsugu ABE ◽  
Yasuo ISHIHARA
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
In Situ Monitoring ◽  
Monitoring And Control ◽  
And Control

scholarly journals Development of an electrochemical sensor for in-situ monitoring of reactive species produced by cold physical plasma

2021 ◽  
Vol 326 ◽  
pp. 129007
Author(s):  
Zahra Nasri ◽  
Giuliana Bruno ◽  
Sander Bekeschus ◽  
Klaus-Dieter Weltmann ◽  
Thomas von Woedtke ◽  
...  
Keyword(s):  
Electrochemical Sensor ◽  
Reactive Species ◽  
In Situ Monitoring ◽  
Physical Plasma

In Situ Monitoring of Polaron Localization and Cell Activity with Charge Accumulation Spectroscopy

2021 ◽  
pp. 2105799
Author(s):  
Yu Zhang ◽  
Li Yang ◽  
Jintao Wang ◽  
Wangying Xu ◽  
Qiming Zeng ◽  
...  
Keyword(s):  
Cell Activity ◽  
In Situ Monitoring ◽  
Charge Accumulation
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