Characterization of anisotropic stress around Si trenches by polarized Raman spectroscopy
Keyword(s):
1997 ◽
Vol 48
(5)
◽
pp. 567-568
2012 ◽
Vol 95
(9)
◽
pp. 2766-2768
◽
Keyword(s):
2003 ◽
Vol 378
(3-4)
◽
pp. 257-262
◽