Mechanism of negative‐bias temperature instability in polycrystalline‐silicon thin film transistors

S. Maeda; S. Maegawa; T. Ipposhi; H. Nishimura; T. Ichiki; J. Mitsuhashi; M. Ashida; T. Muragishi; Y. Inoue; T. Nishimura

doi:10.1063/1.358430

Mechanism of negative‐bias temperature instability in polycrystalline‐silicon thin film transistors

Journal of Applied Physics ◽

10.1063/1.358430 ◽

1994 ◽

Vol 76 (12) ◽

pp. 8160-8166 ◽

Cited By ~ 19

Author(s):

S. Maeda ◽

S. Maegawa ◽

T. Ipposhi ◽

H. Nishimura ◽

T. Ichiki ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability

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Degradation of Low Temperature Polycrystalline Silicon Thin Film Transistors under Negative Bias Temperature Instability Stress with Illumination Effect

Journal of The Electrochemical Society ◽

10.1149/1.3265456 ◽

2010 ◽

Vol 157 (2) ◽

pp. J29 ◽

Cited By ~ 4

Author(s):

Chia-Sheng Lin ◽

Ying-Chung Chen ◽

Ting-Chang Chang ◽

Hung-Wei Li ◽

Wei-Che Hsu ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability ◽

Illumination Effect

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Illumination-Assisted Negative Bias Temperature Instability Degradation in Low Temperature Polycrystalline Silicon Thin-Film Transistors

Electrochemical and Solid-State Letters ◽

10.1149/1.3115400 ◽

2009 ◽

Vol 12 (6) ◽

pp. H229 ◽

Cited By ~ 1

Author(s):

Chia-Sheng Lin ◽

Ying-Chung Chen ◽

Ting-Chang Chang ◽

Wei-Che Hsu ◽

Shih-Ching Chen ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability

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Plasma Damage-Enhanced Negative Bias Temperature Instability in Low-Temperature Polycrystalline Silicon Thin-Film Transistors

IEEE Electron Device Letters ◽

10.1109/led.2006.883564 ◽

2006 ◽

Vol 27 (11) ◽

pp. 893-895 ◽

Cited By ~ 7

Author(s):

C.-Y. Chen ◽

J.-W. Lee ◽

W.-C. Chen ◽

H.-Y. Lin ◽

K.-L. Yeh ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Plasma Damage ◽

Temperature Instability ◽

Bias Temperature Instability

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Negative Bias Temperature Instability Dominated Degradation of Metal-Induced Laterally Crystallized p-Type Polycrystalline Silicon Thin-Film Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2009.2014428 ◽

2009 ◽

Vol 56 (4) ◽

pp. 587-594 ◽

Cited By ~ 22

Author(s):

Chunfeng Hu ◽

Mingxiang Wang ◽

Bo Zhang ◽

Man Wong

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability ◽

P Type

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Analysis of Negative Bias Temperature Instability in Body-Tied Low-Temperature Polycrystalline Silicon Thin-Film Transistors

IEEE Electron Device Letters ◽

10.1109/led.2007.914083 ◽

2008 ◽

Vol 29 (2) ◽

pp. 165-167 ◽

Cited By ~ 10

Author(s):

Chih-Yang Chen ◽

Ming-Wen Ma ◽

Wei-Cheng Chen ◽

Hsiao-Yi Lin ◽

Kuan-Lin Yeh ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability

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Water-enhanced negative bias temperature instability in p-type low temperature polycrystalline silicon thin film transistors

Microelectronics Reliability ◽

10.1016/j.microrel.2013.07.082 ◽

2014 ◽

Vol 54 (1) ◽

pp. 30-32 ◽

Cited By ~ 5

Author(s):

Meng Zhang ◽

Wei Zhou ◽

Rongsheng Chen ◽

Man Wong ◽

Hoi-Sing Kwok

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability ◽

P Type

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Negative Bias Temperature Instability in Low-Temperature Polycrystalline Silicon Thin-Film Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2006.885543 ◽

2006 ◽

Vol 53 (12) ◽

pp. 2993-3000 ◽

Cited By ~ 80

Author(s):

Chih-Yang Chen ◽

Jam-Wem Lee ◽

Shen-De Wang ◽

Ming-Shan Shieh ◽

Po-Hao Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Temperature Instability ◽

Bias Temperature Instability

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Analysis of Negative Bias Temperature Instability Degradation in p-Type Low-Temperature Polycrystalline Silicon Thin-Film Transistors of Different Grain Sizes

IEEE Electron Device Letters ◽

10.1109/led.2019.2942102 ◽

2019 ◽

Vol 40 (11) ◽

pp. 1768-1771 ◽

Cited By ~ 3

Author(s):

Hong-Yi Tu ◽

Tsung-Ming Tsai ◽

Chia-Chuan Wu ◽

Yu-Ching Tsao ◽

Mao-Chou Tai ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Silicon Thin Film ◽

Grain Sizes ◽

Bias Temperature Instability ◽

P Type

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Dynamic Negative Bias Temperature Instability (NBTI) of Low-Temperature Polycrystalline Silicon (LTPS) Thin-Film Transistors

IEEE Electron Device Letters ◽

10.1109/led.2008.919603 ◽

2008 ◽

Vol 29 (5) ◽

pp. 477-479 ◽

Cited By ~ 17

Author(s):

J. C. Liao ◽

Y. K. Fang ◽

C. H. Kao ◽

C. Y. Cheng

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability

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The effects of device geometry on the negative bias temperature instability of Hf-In-Zn-O thin film transistors under light illumination

Applied Physics Letters ◽

10.1063/1.3541783 ◽

2011 ◽

Vol 98 (2) ◽

pp. 023507 ◽

Cited By ~ 16

Author(s):

Jeong Hwan Kim ◽

Un Ki Kim ◽

Yoon Jang Chung ◽

Ji Sim Jung ◽

Sang Ho Ra ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Light Illumination ◽

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability ◽

Device Geometry

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