Low‐temperature synthesis of silicon oxide, oxynitride, and nitride films by pulsed excimer laser ablation

1994 ◽  
Vol 76 (5) ◽  
pp. 2612-2620 ◽  
Author(s):  
E. Fogarassy ◽  
C. Fuchs ◽  
A. Slaoui ◽  
S. de Unamuno ◽  
J. P. Stoquert ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Low Temperature ◽  
Excimer Laser ◽  
Silicon Oxide ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Excimer Laser Ablation

Preparation of PbTiO3thin films at low temperature by an excimer laser ablation technique

1991 ◽  
Vol 59 (19) ◽  
pp. 2354-2356 ◽  
Author(s):  
Hitoshi Tabata ◽  
Tomoji Kawai ◽  
Shichio Kawai ◽  
Osamu Murata ◽  
Junzo Fujioka ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Low Temperature ◽  
Excimer Laser ◽  
Excimer Laser Ablation ◽  
Ablation Technique ◽  
Laser Ablation Technique

Low Teperature Synthesis of Silicon Oxide and Oxynitride Films by Reactive Laser Ablation

1992 ◽  
Vol 285 ◽  
Author(s):  
E. Fogaassy ◽  
C. Fuchs ◽  
A. Slaoui ◽  
S. De unamumo ◽  
J.-P. Stoquert ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Laser Ablation ◽  
Low Temperature ◽  
Silicon Oxide ◽  
Silicon Monoxide ◽  
Fused Silica ◽  
Excimer Laser Ablation ◽  
Arf Excimer Laser ◽  
Silicon Silicon ◽  
Specific Influence

ABSTRACTSilicon oxide and oxynitride films are deposited, at low temperature (≤ 450°C) by pulsed ArF excimer laser ablation from silicon, silicon monoxide, fused silica and silicon nitride targets, performed under vacuum and in oxygen atmosphere. We investigate in this paper the specific influence of laser fluence, target materials, substrate temtperature and oxygen pressure on the composition and final properties of SiOxNy grown layers. The synthesis of good quality SiO2 films is demonstratedx. By contrast, the preparation of stoichiometric Si7N4 layers by laser ablation has to be optimized.

Low-temperature Synthesis and Characterizations of LaFeAsO Nanocrystals

2015 ◽  
Vol 30 (12) ◽  
pp. 1273
Author(s):  
ZHANG De-Xing ◽  
SUN Yun-Lei ◽  
ABULIMIT Abuduweli ◽  
CAO Guang-Han
Keyword(s):  
Low Temperature ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis
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