Self-consistent particle modeling of radio frequency discharge in Ar/O2 mixtures: Effects of crossed electric and magnetic fields and partial pressure
1955 ◽
Vol 6
(3)
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pp. 100-103
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2015 ◽
Vol 24
(5)
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pp. 054006
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2007 ◽
Vol 35
(5)
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pp. 1241-1246
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Keyword(s):
2002 ◽
Vol 192
(1-4)
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pp. 26-49
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Keyword(s):
2021 ◽
Vol 1198
(1)
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pp. 012003