Structural characterization of a bonded silicon‐on‐insulator layer with voids by micro‐Raman spectroscopy

1994 ◽  
Vol 75 (12) ◽  
pp. 7866-7868 ◽  
Author(s):  
Akira Usami ◽  
Masaya Ichimura ◽  
Takao Wada ◽  
Shun‐ichiro Ishigami
Keyword(s):  
Raman Spectroscopy ◽  
Structural Characterization ◽  
Silicon On Insulator ◽  
Insulator Layer ◽  
Micro Raman Spectroscopy

Structural characterization of TiO_2 optical coatings by Raman spectroscopy

1983 ◽  
Vol 22 (12) ◽  
pp. 1837 ◽  
Author(s):  
W. T. Pawlewicz ◽  
G. J. Exarhos ◽  
W. E. Conaway
Keyword(s):  
Raman Spectroscopy ◽  
Structural Characterization ◽  
Optical Coatings

XRD, SEM/EDX and micro-Raman spectroscopy for mineralogical and chemical characterization of iron slags from the Roman archaeological site of Forua (Biscay, North Spain)

2018 ◽  
Vol 138 ◽  
pp. 246-254 ◽  
Author(s):  
Haizea Portillo ◽  
Maria Cruz Zuluaga ◽  
Luis Angel Ortega ◽  
Ainhoa Alonso-Olazabal ◽  
Xabier Murelaga ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Chemical Characterization ◽  
Archaeological Site ◽  
Micro Raman Spectroscopy

scholarly journals Micro-Raman Spectroscopy, a Powerful Technique Allowing Sure Identification and Complete Characterization of Asbestiform Minerals

2019 ◽  
Vol 9 (15) ◽  
pp. 3092 ◽  
Author(s):  
Caterina Rinaudo ◽  
Alessandro Croce
Keyword(s):  
Raman Spectroscopy ◽  
Crystal Surface ◽  
Complete Characterization ◽  
Mineral Phase ◽  
Asbestos Fibers ◽  
Micro Raman Spectroscopy ◽  
Fibrous Minerals ◽  
Iron Sulphate ◽  
Asbestiform Minerals

Micro-Raman spectroscopy has been applied to fibrous minerals regulated as “asbestos”—anthophyllite, actinolite, amosite, crocidolite, tremolite, and chrysotile—responsible of severe diseases affecting mainly, but not only, the respiratory system. The technique proved to be powerful in the identification of the mineral phase and in the recognition of particles of carbonaceous materials (CMs) lying on the “asbestos” fibers surface. Also, erionite, a zeolite mineral, from different outcrops has been analyzed. To erionite has been ascribed the peak of mesothelioma noticed in Cappadocia (Turkey) during the 1970s. On the fibers, micro-Raman spectroscopy allowed to recognize many grains, micrometric in size, of iron oxy-hydroxides or potassium iron sulphate, in erionite from Oregon, or particles of CMs, in erionite from North Dakota, lying on the crystal surface. Raman spectroscopy appears therefore to be the technique allowing, without preparation of the sample, a complete characterization of the minerals and of the associated phases.

Non-Destructive Assessment of Thin Film Stresses and Crystal Qualify of Silicon on Insulator Materials with Raman Spectroscopy

1990 ◽  
Vol 188 ◽  
Author(s):  
Ingrid De Wolf ◽  
Jan Vanhellemont ◽  
Herman E. Maes
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Raman Spectroscopy ◽  
Cross Section ◽  
Silicon Layer ◽  
Silicon On Insulator ◽  
Micro Raman Spectroscopy ◽  
Transmission Electron ◽  
Non Destructive ◽  
Zone Melt

ABSTRACTMicro Raman spectroscopy (RS) is used to study the crystalline quality and the stresses in the thin superficial silicon layer of Silicon-On-Insulator (SO) materials. Results are presented for SIMOX (Separation by IMplanted OXygen) and ZMR (Zone Melt Recrystallized) substrates. Both as implanted and annealed SIMOX structures are investigated. The results from the as implanted structures are correlated with spectroscopic ellipsometry (SE) and cross-section transmission electron microscopy (TEM) analyses on the same material. Residual stress in ZMR substrates is studied in low- and high temperature gradient regions.

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