Temperature dependent electron‐beam‐induced‐current investigation of electronic damages in silicon due to reactive ion etching

1994 ◽  
Vol 75 (2) ◽  
pp. 804-808 ◽  
Author(s):  
G. Jäger‐Waldau ◽  
H.‐U. Habermeier ◽  
G. Zwicker ◽  
E. Bucher
Keyword(s):  
Electron Beam ◽  
Reactive Ion Etching ◽  
Induced Current ◽  
Current Investigation ◽  
Temperature Dependent ◽  
Ion Etching ◽  
Electron Beam Induced Current

Electron Beam Induced Current Imaging of Silicon Oxide Damage Due to Reactive Ion Etching

1996 ◽  
Vol 51-52 ◽  
pp. 359-366
Author(s):  
Hary Kirk ◽  
Zbigniew J. Radzimski ◽  
A. Romanowski ◽  
George A. Rozgonyi
Keyword(s):  
Electron Beam ◽  
Silicon Oxide ◽  
Reactive Ion Etching ◽  
Induced Current ◽  
Ion Etching ◽  
Electron Beam Induced Current ◽  
Oxide Damage

scholarly journals Electron-Beam-Induced Current and Cathodoluminescence Study of Dislocations in SrTiO3

Crystals ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 736
Author(s):  
Wei Yi ◽  
Jun Chen ◽  
Takashi Sekiguchi
Keyword(s):  
Electron Beam ◽  
Resistive Switching ◽  
Oxygen Vacancies ◽  
Energy Levels ◽  
Induced Current ◽  
Temperature Dependent ◽  
Recombination Activity ◽  
Defect Energy ◽  
Electron Beam Induced Current ◽  
Cathodoluminescence Study

Electron-beam-induced current (EBIC) and cathodoluminescence (CL) have been applied to investigate the electrical and optical behaviors of dislocations in SrTiO3. The electrical recombination activity and defect energy levels of dislocations have been deduced from the temperature-dependent EBIC measurement. Dislocations contributed to resistive switching were clarified by bias-dependent EBIC. The distribution of oxygen vacancies around dislocations has been obtained by CL mapping. The correlation between switching, dislocation and oxygen vacancies was discussed.

Electron beam-induced current investigation of GaN Schottky diode

2005 ◽  
Vol 34 (7) ◽  
pp. 1059-1064 ◽  
Author(s):  
A. Matoussi ◽  
T. Boufaden ◽  
S. Guermazi ◽  
Y. Mlik ◽  
B. El Jani ◽  
...  
Keyword(s):  
Electron Beam ◽  
Schottky Diode ◽  
Induced Current ◽  
Current Investigation ◽  
Electron Beam Induced Current

scholarly journals Temperature-dependent signals in STEM Electron Beam-Induced Current (EBIC) Imaging

2017 ◽  
Vol 23 (S1) ◽  
pp. 1506-1507
Author(s):  
William A. Hubbard ◽  
Edward. R. White ◽  
Matthew Mecklenburg ◽  
B. C. Regan
Keyword(s):  
Electron Beam ◽  
Induced Current ◽  
Temperature Dependent ◽  
Electron Beam Induced Current

Modification of Recombination Activity of Dislocations in Si and SiGe by Contamination and Hydrogenation

1995 ◽  
Vol 378 ◽  
Author(s):  
M. Kittler ◽  
W. Seifert ◽  
V. Higgs
Keyword(s):  
Electron Beam ◽  
Low Temperature ◽  
Electrical Activity ◽  
Misfit Dislocations ◽  
Induced Current ◽  
Temperature Dependent ◽  
Recombination Activity ◽  
Dislocation Activity ◽  
Cu Contamination ◽  
Electron Beam Induced Current

AbstractTemperature-dependent (80 … 300 K) measurements of dislocation recombination activity by the electron-beam-induced-current (EBIC) technique are reported. Controlled Cu contamination (ppb to ppm range), chemomechanical polishing and hydrogenation treatments were applied to alter dislocation properties. Increasing Cu level is found not only to increase the electrical activity of misfit dislocations in SiGe/Si structures at 300 K, but also to change its dependence on temperature. At low contamination, shallow centres control dislocation activity while deep centres are characteristic at higher Cu levels. Heavy Cu contamination results in very strong recombination activity which is attributed to precipitates. Chemomechanical polishing has an effect which is analogous to medium Cu contamination. Hydrogenation was found to passivate recombination activity at 300 K, but did not show pronounced effects on activity at low temperature.

scholarly journals Temperature Dependent Electron Beam Induced Current Study of Defects in Silicon

1993 ◽  
Vol 83 (1) ◽  
pp. 71-79 ◽  
Author(s):  
T. Sekiguchi ◽  
S. Kusanagi ◽  
Y. Miyamura ◽  
K. Sumino
Keyword(s):  
Electron Beam ◽  
Induced Current ◽  
Temperature Dependent ◽  
Electron Beam Induced Current
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