Transmission electron microscopy analysis of ‘‘black belt:’’ The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

Tan‐Tsu Sheng; Chih‐Yuan Lu; Ruey‐Dar Chang; Song‐Tsan Chiang

doi:10.1063/1.356057

Transmission electron microscopy analysis of ‘‘black belt:’’ The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

Journal of Applied Physics ◽

10.1063/1.356057 ◽

1994 ◽

Vol 75 (8) ◽

pp. 3810-3813 ◽

Cited By ~ 1

Author(s):

Tan‐Tsu Sheng ◽

Chih‐Yuan Lu ◽

Ruey‐Dar Chang ◽

Song‐Tsan Chiang

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Black Belt ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Local Oxidation ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Cross-sectional transmission electron microscopy analysis of a single self-assembled quantum dot single electron transistor fabricated by atomic force microscope local oxidation

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.045202 ◽

2014 ◽

Vol 53 (4) ◽

pp. 045202

Author(s):

Rai Moriya ◽

Eriko Ikenaga ◽

Kenji Shibata ◽

Kazuhiko Hirakawa ◽

Satoru Masubuchi ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Single Electron Transistor ◽

Transmission Electron Microscopy Analysis ◽

Cross Sectional ◽

Atomic Force ◽

Transmission Electron ◽

Local Oxidation ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Cross-Sectional Transmission Electron Microscopy Analysis of Nanogap Electrode Fabricated by Atomic Force Microscope Local Oxidation

Japanese Journal of Applied Physics ◽

10.7567/jjap.52.055201 ◽

2013 ◽

Vol 52 (5R) ◽

pp. 055201 ◽

Cited By ~ 1

Author(s):

Rai Moriya ◽

Eriko Ikenaga ◽

Satoru Masubuchi ◽

Tomoki Machida

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Atomic Force Microscope ◽

Transmission Electron Microscopy Analysis ◽

Cross Sectional ◽

Atomic Force ◽

Transmission Electron ◽

Local Oxidation ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Transmission electron microscopy analysis of planar faults on (001) planes in MoSi2single crystals

Philosophical Magazine A ◽

10.1080/01418610208240063 ◽

2002 ◽

Vol 82 (14) ◽

pp. 2737-2754 ◽

Cited By ~ 2

Author(s):

Susanne Guder ◽

Martin Bartsch ◽

Ulrich Messerschmidt

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Core structure and dissociation energetics of basal edge dislocation in α-Al2O3: A combined atomistic simulation and transmission electron microscopy analysis

Acta Materialia ◽

10.1016/j.actamat.2013.11.035 ◽

2014 ◽

Vol 65 ◽

pp. 76-84 ◽

Cited By ~ 9

Author(s):

Kenji Tsuruta ◽

Eita Tochigi ◽

Yuki Kezuka ◽

Kazuaki Takata ◽

Naoya Shibata ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Edge Dislocation ◽

Atomistic Simulation ◽

Core Structure ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis ◽

Α Al2o3

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Transmission electron microscopy analysis of a TiNx substoichiometric CVD coating

Journal of Materials Science ◽

10.1007/bf00361161 ◽

1993 ◽

Vol 28 (18) ◽

pp. 4957-4961 ◽

Cited By ~ 2

Author(s):

J. L. Derep ◽

E. Beauprez

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Rutherford backscattering/channeling and transmission electron microscopy analysis of epitaxial BaF2 films on Ge and InP

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.582495 ◽

1983 ◽

Vol 1 (2) ◽

pp. 246 ◽

Cited By ~ 20

Author(s):

J. M. Phillips

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Rutherford Backscattering ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Transmission electron microscopy analysis of corroded metal waste forms.

10.2172/861616 ◽

2005 ◽

Cited By ~ 1

Author(s):

N L Dietz

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron Microscopy Analysis ◽

Waste Forms ◽

Metal Waste ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Transmission Electron Microscopy Analysis and First-Principles Calculations of Phase Transition from Coesite to Quartz

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2017.14451 ◽

2017 ◽

Vol 17 (9) ◽

pp. 6754-6758

Author(s):

Weiping Liu ◽

Long Chen ◽

Anqi Wang ◽

Dawei Meng ◽

Xiuling Wu ◽

...

Keyword(s):

Electron Microscopy ◽

Phase Transition ◽

Transmission Electron Microscopy ◽

First Principles ◽

First Principles Calculations ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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Misfit-layered compound PbTiS 3 with incommensurate modulation: Transmission electron microscopy analysis and transport properties

Chinese Physics B ◽

10.1088/1674-1056/22/11/116102 ◽

2013 ◽

Vol 22 (11) ◽

pp. 116102

Author(s):

Xi Shen ◽

Dan Cheng ◽

Hao-Fei Zhao ◽

Yuan Yao ◽

Xiao-Yang Liu ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transport Properties ◽

Layered Compound ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Incommensurate Modulation ◽

Microscopy Analysis

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In-Situ Transmission Electron Microscopy Analysis of a Calcium-Birnessite Water-Oxidation Catalyst

10.29363/nanoge.nfm.2018.147 ◽

2018 ◽

Author(s):

Emanuel Ronge ◽

Vladimir Roddatis ◽

Jonas Ohms ◽

Philipp Kurz ◽

Christian Jooss

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Water Oxidation ◽

Oxidation Catalyst ◽

Transmission Electron Microscopy Analysis ◽

Transmission Electron ◽

Electron Microscopy Analysis ◽

Microscopy Analysis

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