Experimental study and computer simulation of collimated sputtering of titanium thin films over topographical features

1993 ◽  
Vol 74 (2) ◽  
pp. 1339-1344 ◽  
Author(s):  
D. Liu ◽  
S. K. Dew ◽  
M. J. Brett ◽  
T. Janacek ◽  
T. Smy ◽  
...  
2010 ◽  
Vol 518 (10) ◽  
pp. 2632-2636 ◽  
Author(s):  
Taslema Sultana ◽  
Golam Newaz ◽  
Grigor L. Georgiev ◽  
Ronald J. Baird ◽  
Gregory W. Auner ◽  
...  

1972 ◽  
Vol 5 (1) ◽  
pp. 57-61 ◽  
Author(s):  
B. V. Zheleznyi ◽  
Z. M. Zorin ◽  
W. D. Sobolev ◽  
N. V. Churaev

1977 ◽  
Vol 8 (41) ◽  
pp. no-no
Author(s):  
J. D. PISTRE ◽  
J. SALARDENNE ◽  
P. SMUTEK

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